MPG40x ATM to Ultra-High Vacuum Gauge

 

The INFICON Inverted Magnetron Pirani Gauges, MPG400 and MPG401, measure from 5 x 10-9 mbar toatmosphere (3.8 x 10-9 Torr to atmosphere). Combining technologies into one single compact unit withone logarithmic analog out put signal significantly reduces the complexity of installation, setup andintegration.

Benefits

  • Combination gauge – Inverted Magnetron & Pirani
  • Wide measurement range from 5 x 10-9 mbar to atmosphere
  • No filament to burn out
  • Excellent ignition properties
  • Easy to clean
  • FPM or metal-sealed feedthrough
  • LED indicator for high voltage on
  • Logarithmic analog output signal

Typical Applications

  • High vacuum pressure monitoring
  • Base pressure for evaporation and sputtering systems
  • General vacuum measurement and control in the medium and high vacuum range
  • MPG400/ 401 Inverted Magnetron Pirani Gauge

Specifications

Type MPG400 FPM sealed MPG401 metal-sealed
Measurement range (air, N2) 5 x 10-9 … 1000 5 x 10-9 … 1000
Accuracy (N2)    
1 x 10-8 … 100 mbar % of reading ≈±30% ≈±30%
Repeatability    
1 x 10-8 … 100 mbar % of reading ≈±5% ≈±5%
Mounting orientation any any
Admissible pressure bar (absolute) ≤10 (limited to inert gases) ≤10 (limited to inert gases)
Admissible temperature    
Operation (ambient) °C +5 … +55 +5 … +55
Storage °C –40 … +65 –40 … +65
Bake-out (1) °C 150 150
Filament temperature (Pirani) °C 120 120
Supply voltage    
At gauge V (dc) +15 … +30 +15 … +30
At supply unit with max. cable length (2) V (dc) +16 … +30 +16 … +30
Ripple V (p-p) ≤1 ≤1
Power consumption W ≤2 ≤2
Fuse to be connected AT ≤1 ≤1
Output signal (measurement signal)    
Voltage range V 0 … +10.5 0 … +10.5
Measurement range V +1.82 … +8.6 +1.82 … +8.6
Voltage vs. Pressure logarithmic, 0.6 volts per decade logarithmic, 0.6 volts per decade
Error signal    
no supply V <0.5 <0.5
Pirani sensor, filament rupture V >9.5 >9.5
Output impedance 2 x 10 2 x 10
Minimum loaded impedance kΩ 10, short-circuit proof 10, short-circuit proof
Response time    
p > 10-6 mbar ms <10 <10
p = 10-8 mbar ms ≈1000 ≈1000
Identification gauge 85, referenced to supply common 85, referenced to supply common
Status    
Pirani-only mode V 0 (low) 0 (low)
Combined Pirani / cold cathode mode V 15 … 30 (high) 15 … 30 (high)
LED LED green high voltage on high voltage on
Electrical connection FCC 68 appliance connector, 8 poles, female FCC 68 appliance connector, 8 poles, female
Sensor cable 8 poles plus shielding 8 poles plus shielding
Cable length m ≤50 (8 x 0.14 mm2) ≤50 (8 x 0.14 mm2)
Operating voltage kV ≤3.3 ≤3.3
Operating current µA ≤500 ≤500
Materials exposed to vacuum stainless steel, Al2O3, FPM75, Mo, Ni, Au, W stainless steel, Al2O3, Ag, Cu, Sn, Mo, Ni, Au, W
Internal volume cm³ ≈20 ≈20
Weight    
DN 25 ISO-KF g ≈700 ≈730
DN 40 ISO-KF g ≈720 ≈750
DN 40 CF-F g ≈980 ≈1010
Protection category IP 40 IP 40
Standards    
CE conformity EN 61000-6-2, EN 61000-6-3, EN 61010-1 EN 61000-6-2, EN 61000-6-3, EN 61010-1

1) Without electronics and magnetic shielding.

2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.

Part Number

MPG400 FPM sealed
Part Number Description
351-010 MPG400 FPM sealed, DN 25 ISO-KF
351-011 MPG400 FPM sealed, DN 40 ISO-KF
351-012 MPG400 FPM sealed, DN 40 CF-F
MPG401 metal-sealed
Part Number Description
351-020 MPG401 metal sealed, DN 25 ISO-KF
351-021 MPG401 metal sealed, DN 40 ISO-KF
351-022 MPG401 metal sealed, DN 40 CF-F
351-023 Magnetic shield

Accessories

MPG400 FPM sealed
Part Number Description
351-023 Magnetic shield
MPG401 metal-sealed
Part Number Description
351-023 Magnetic shield

Spare Parts

MPG400 FPM sealed
Part Number Description
BN846469-T Spare measurement system MPG400
BN846470-T Spare measurement system MPG400 DN40 KF
BN846471-T Spare measurement system MPG400 DN40CF-F
351-994 MPG40x Ignition tool set
351-995 MxG40x/50x Spare parts ignition aid (10)
351-998 MPG400 Repair set.
351-999 MPG400 Maintenance set
MPG401 metal-sealed
Part Number Description
BN846472-T Replacement meas. unit MPG401 DN25 KF
BN846473-T Replacement meas. unit MPG401 DN40 KF
BN846474-T Spare meas. system, MPG401 DN40CF-F
351-994 MPG40x Ignition tool set
351-995 MxG40x/50x Spare parts ignition aid (10)
351-996 MPG401 Repair set
351-997 MPG401 Maintenance set
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