Guardian™ EIES Controller

Simultaneous Deposition of Up to Eight Materials

Ideal for CIGS Thin Films

Guardian can control deposition rates from 0.1 to 10,000 Å/s. It operates one or two sensors, up to 8 optical inputs and controls up to 8 deposition sources, enabling codeposition of up to 8 materials.

INFICON Guardian is ideal for applications such as fabrication of photovoltaic modules, OLEDs, photovoltaics, superconducting thin films and MBE.

The Guardian Codeposition System is based on Electron Impact Emission Spectroscopy (EIES). Using EIES, the material being deposited is excited by a thermionic emitter, which results in creation of photons. The light created passes through an optical filter to a photomultiplier tube (PMT) detector, which measures the intensity of emission of the passed wavelength. The INFICON Guardian Controller then generates a signal to control the source for that material. Additional detectors, with appropriate optical filters, are used for multiple materials.

A complete Guardian system consists of at least one sensor, one PMT detector, an optical filter, a Guardian controller unit, and a PC (user-supplied) with Guardian software. EIES is generally used to control deposition of multiple materials, so most EIES systems include additional sensors, detectors, optical components such as beam splitters, and QCMs for calibration or controlling deposition rate for some materials. More information on typical systems can be found in the Guardian Configuration Guide in the Downloads tab below.

To Configure a Guardian Codeposition System, Consider the Following
What are the primary and secondary emission wavelengths for your deposition materials?

If different materials have peaks too close to each other, you may need to monitor a secondary wavelength, which has lower signal strength.

During the deposition process, what background gases are present in your vacuum chamber and what are the emission wavelengths for those gases?

If emissions from background gases interfere with the deposition materials, a gas compensating sensor is recommended.

EIES is most effective with the uniquely defined spectra of atomic species. Molecular species that generate unstable or broad emission spectra cannot be measured accurately. EIES is not recommended for organic materials. These, and other factors, determine the optimum EIES system configuration for each specific application.

Features

  • Monitor and control simultaneous deposition of up to 8 materials
  • Deposition rates from 0.1 to 10,000 Å/s
  • Integrated EIES and QCM thin film process control
  • 12 relay outputs and 12 digital inputs
  • Windows-based software for setup and operation
  • Compatible with INFICON Sentinel® sensors

Specifications

Type Guardian EIES Controller
Sensors  
Operating pressure <5x10-4 Torr
Temperature 450° C maximum during operation and/or bakeout
Size (approximate) 0.75 in. x 1.25 in. x 1.75 in. (19 mm x 32 mm x 45 mm)
Filament life (typical) ~1000 hours at 2mA emission (Yttria), 4mA for Thoria
Sensor-feedthrough linkage Rigid ss tube, adjustable from 7 in. to 22 in. (175 mm to 550 mm)
Feedthrough / flange One optical and four electrical feedthroughs on 2.75 in.CF (NW35CF)
Detector  
Photomultiplier tube (PMT) Hamamatsu R7518 or equivalent
Spectral response 185 to 730 nm
Detection limit Better than 5 fW of optical input power
PMT gain 103 to 107 (detectors are independently adjustable)
Output resolution 20-bit
Optical entrance port Built-in filter holder, for filters up to 1 in. (25mm) diameter and 0.2 in. (5mm) thick
Size 2 in. x 5.5 in. x 2.75 in. (50 mm x 140 mm x 70 mm) mounting holes on three sides (optional mounting brackets available)
Controllers  
Sensors

016-600-G22: Standard Sensor Assembly 22 in.

016-601-G22: Gas Compensating Sensor Assembly 22 in.

Detectors Eight optical detector channels
Control outputs Eight source control outputs, 0 to ±10 VDC programmable
Digital I/O 12 relay outputs and 12 logic inputs
Power 100-240 VAC, 50/60Hz, 150W
Size 19 in. x 3.5 in. x 12 in. (483 mm x 89 mm x 305 mm)
Compliance CE
User interface software: Windows®-based setup program included with Controller
Software displays deposition rate: 4-digit numeric display of all channels, from 0.001 to 9999 Å/s, and graphical X-Y scrolling plot with selectable scales.
Software displays thickness: 4-digit numeric display with range selection, from 0.001 to 9999 KÅ
Computer user-supplied: Any PC with Windows® Vista/XP/2000 operating system, and Ethernet or RS-232 interface

Part Number

Guardian EIES Controller
Part Number Description
782-900-031 Guardian Controller for one sensor (standard or gas compensating)
782-900-050 Guardian Controller for two sensors (standard or gas compensating)

Accessories

Part Number Description
EIES Sensors
016-600-G22 Guardian Standard Single Sensor and Feedthrough Assembly, 22 in. (539 mm), CF40 Flange
016-601-G22 Guardian Gas Compensating Sensor and Feedthrough Assembly, 22 in. (539 mm), CF40 Flange
Beam Splitters Fiber Optic Beam Splitters split the beam of light from the sensor to allow measurement of multiple materials per EIES sensor.
782-900-034 Guardian Fiber Optic Beam Splitter (1:3) - 400 mm length
782-900-034-x-yyy Guardian Fiber Optic Beam Spliter (1:x) - yyy mm length
Filament Cables Connects the EIES sensor to the Guardian controller
600-1406-P10 Guardian Single Filament cable, 10 ft. (3 m) - For standard EIES sensor
600-1406-P40 Guardian Single Filament cable, 40 ft. (12 m) - For standard EIES sensor
600-1407-P10 Guardian Dual Filament cable, 10 ft. (3m) - For gas compensating EIES sensor
600-1407-P40 Guardian Dual Filament cable, 40 ft. (12 m) - For gas compensating EIES sensor
PMT Detector
782-900-030 Guardian PMT Detector
PMT Detector Cables Connects the PMT Detector to the Guardian controller
782-505-065 Guardian Detector cable 10 ft. (3 m)
782-505-065-40 Guardian Detector cable, 40 ft. (12 m)
Optical Filters Select the wavelength appropriate for your material
782-900-035-202 Optical filter - 202nm, BP10nm (Zn)
782-900-035-241 Optical Filter - 241nm, BP10nm (Co, Au)
782-900-035-252 Optical Filter - 252nm, BP10nm, (Si)
782-900-035-265 Optical Filter - 265nm, BP10nm, (Ge, Pt, Ta, Ir)
782-900-035-267 Optical Filter, 267 nm, Guardian
782-900-035-294 Optical Filter 294nm, BP2nm, (Hf) (Ga [when using a gas compensating sensor])
782-900-035-304 Optical Filter 304nm, BP2nm (Ba, In [when using a gas compensation sensor])
782-900-035-325 Optical Filter - 325nm, BP10nm (Cu, Cd)
782-900-035-358 Optical Filter - 358nm, BP10nm, (Nb, U, Cr)
782-900-035-364 Optical Filter - 364nm, BP10nm (Ti, Pb)
782-900-035-396 Optical Filter - 396nm, BP10nm, (Al)
782-900-035-417 Optical Filter - 417nm, BP2nm, (Ga)
782-900-035-451 Optical Filter - 451nm, BP5nm, (In)
782-900-070 Guardian Monochromator Kit

Spare Parts

Part Number Description
016-201-G1 Emitter assembly for all 016-400-Gx sensors used in 016-600-Gxx and -601-Gxx
782-900-038 Guardian Photomultiplier Tube Replacement
016-509-G22 Guardian Sensor EIES In-vacuum Cable, 22 in. (559 mm), other lengths available
782-530-015 Guardian Sensor Filament Replacement (for discontinued 782-900-029 and -052 sensors)
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