UHV Bakeable Sensor

INFICON UHV Bakeable Crystal Sensors offer proven reliability and durability and have the best thermal stability of any sensor head on the market. Made from 304 Stainless Steel, Molybdenum, Inconel, Nickel, and Alumina materials, the UHV Bakeable Sensor is designed to withstand continuous bakeout temperatures up to 450° C (for bakeout only, water flow required for actual deposition monitoring). The front load design allows for easy insertion of the crystal holder in applications lacking sufficient room for side insertion.

Features

  • High temperature braze & welded construction
  • Bakeout temperatures to 450° C
  • Crystal shutter (option)
  • Front load crystal holder
  • Easy installation
  • CF40 feedthrough
  • No brazing or welding to feedthrough required
  • Sensor/feedthrough combination welded to customer specified lengths

Specifications

Type Bakeable Sensor w/ Shutter Bakeable Sensor w/out Shutter
Maximum temperature 400° C continuous (for bake only; water flow recommended for actual deposition monitoring) 450°C continuous (for bake only; water flow recommended for actual deposition monitoring)
Sensor head size (maximum envelope) 1.35 in. x 1.38 in. x 1.21 in. high (34 mm x 35 mm x 31 mm high 1.35 in. x 1.38 in. x 0.94 in. high (34 mm x 35 mm x 24 mm high)
Crystal exchange Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange. Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
Mounting

a) Standard—four #4-40 tapped holes on the back of the body

b) Optional—right angle bracket; IPN 007-108

Four #4-40 tapped holes on the back of the body
Feedthrough

2¾ in. ConFlat®, integral with sensor head

Water, air and coax tubes are semi-rigid, but easily formed (2.0 in. [50.8 mm] minimum bend radius)

2¾ in. ConFlat, integral with sensor head

Water and coax tubes are semi-rigid, but easily formed. (2.0 in. [50.8 mm] minimum bend radius)

Utilities

1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.)

2) Filtered, oil-free air, regulated at 80 PSIG (5.5 bar) [552 kPa]

3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required

Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.)
Materials    
Body and holder 304 type stainless steel 304 type stainless steel
Springs Molybdenum and Inconel X-750 Molybdenum and Inconel X-750
Water, air and coax lines 0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax  
Other mechanical parts 18-8 or 304 stainless 18-8 or 304 stainless
Insulators >99% Al2O3 in vacuum; other high density ceramics used elsewhere >99% Al2O3 in vacuum; other high density ceramics used elsewhere
Wire

1) Ni (in vacuum)

2) Ni plated Cu (elsewhere)

1) Ni (in vacuum)

2) Ni plated Cu (elsewhere)

Braze Vacuum process high temperature Ni-Cr alloy Vacuum process high temperature Ni-Cr alloy
Crystal 0.550 in. (13.97 mm) diameter 0.550 in. (13.97 mm) diameter

Part Number

FrontLoadBakeable_OrderChart_2013_web-01.png

Accessories

Part Number Description
750-420-G1 Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors)

Consumables

Name Description
Quartz Monitor Crystals Quartz Monitor Crystals

Spare Parts

Part Number Description
007-007 Retainer spring (for crystal holder)
007-064 Ceramic retainer
007-094 Clamping spring
007-095 Handle
007-098 Female Connector (includes ferrules and nut)
007-099 Bakeable head contact
007-100 Insulator for BNC
007-103 Insulator for bakeable head contact
007-104 BNC Body
007-147 #4-40 X 3/8 screw
007-155 Braze assy - 12 in. (30.5 cm)
007-156 Braze assy - 20 in (50.8 cm)
007-157 Braze assy - 30 in. (76.2 cm)
007-228 #4-40 X 5/8 screw
007-267-P2 Spreader bar
007-268-P1 Shoulder washer
007-269-P1 Shoulder washer
008-007 CRYSTAL SNATCHER
059-0084 VCR gasket
070-201 #4 Split lockwasher
084-069-P1 #4-40 x 3/16 screw
750-018-P3 Split clamp
750-018-P5 Split clamp
750-022-G5 Bellows assembly - 12 in. (30.5 cm)
750-022-G6 Bellows assembly - 20 in. (50.8 cm)
750-022-G7 Bellows assembly - 30 in. (76.2 cm)
750-028-G5 Braze assy with air line - 12 in. (30.5 cm)
750-028-G6 Braze assy with air line - 20 in. (50.8 cm)
750-028-G7 Braze assy with air line - 30 in. (76.2 cm)
750-115-P4 Coupling (installs onto bellows assembly)
750-118-P4 Actuator support
750-120-G3 Shaft assembly
750-216-G1 Shutter assembly (part of shutter module)
750-218-G1 Cyrstal holder
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