QCM Sensor Feedthroughs


INFICON offers a variety of Quartz Crystal Monitor (QCM) sensor feedthroughs to accommodate many QCM sensor and chamber configurations. CF40 (2.75 in. ConFlat®) and 2.54 cm (1 in.) bolt style feedthroughs are available with various combinations of electrical connections, water cooling, and air tubes. INFICON feedthroughs may also be equipped with Ultra-Torr O-ring compression fittings for easy installation and sensor length adjustment. Other feedthrough styles may be available on request (KF40, etc), so contact INFICON with your feedthrough needs.

Unless noted, a typical feedthrough electrical connection consists of a coaxial BNC connector on the atmosphere side and a Microdot® connector on the vacuum side. This style of electrical connection is meant for use with in-vacuum cable sensors such as INFICON Front Load single, Front Load dual, Sputtering, CrystalSix, and Crystal 12 sensors.

Note: Feedthrough water and air tubes are 4.8 mm (3/16 in.) OD.


The following table is a quick reference for feedthrough requirements and part numbers based on sensor type.

Features

  • 2.54 cm (1 in.) bolt or CF40 (2.75 in. ConFlat®) styles available
  • Available Ultra-Torr O-ring compression fittings
  • Custom feedthrough configurations available
  • Other feedthrough styles available on request

Part Number

QCM Sensor Feedthroughs
Part Number Description
2.54 cm (1 in.) Bolt Feedthroughs (Includes VITON® O-ring)
002-042 1 in. Bolt Feedthrough, 1 Coax, 2 Tubes
750-030-G1 1 in. Bolt Feedthrough, 1 Coax, 3 Tubes
750-707-G1 1 in. Bolt Feedthrough, 2 Coax, 3 Tubes
750-624-G1 1 in. Bolt Feedthrough, 1 Coax, 2 Tubes
783-501-013 1 in. Bolt Feedthrough, 1 Coax, 2 Tubes, Ultra-Torr O-ring compression fittings
CF40 (2.75 in. ConFlat) Feedthroughs (Includes copper gasket)
002-043 CF40 Feedthrough, 1 Coax, 2 Tubes
750-685-G1 CF40 Feedthrough, 1 Coax,3 Tubes
002-080 CF40 Feedthrough, 2 Coax, 3 Tubes
750-683-G1 CF40 Feedthrough, 1 Coax, 4 Tubes
206-878-G2 CF40 Feedthrough, 1 Coax, 2 Tubes, Ultra-Torr O-ring compression fittings
750-685-G2 CF40 Feedthrough, 1 Coax, 3 Tubes, Ultra-Torr O-ring compression fittings
206-890-G2 CF40 Feedthrough, 2 Coax, 3 Tubes, Ultra-Torr O-ring compression fittings
KF40 Feedthroughs (Does not include centering ring or clamp)
130246 KF40 Feedthrough, 1 Coax, 2 Tubes
130239 KF40 Feedthrough, 1 Coax, 3 Tubes

Accessories

Name Description
Clamping Ring with Wing Nut Clamping Ring with Wing Nut
QCM Sensor Feedthroughs
Part Number Description
782-902-022 BNC to Microdot® adapter cable, 15.2 cm (6 in.)

Spare Parts

QCM Sensor Feedthroughs
Part Number Description
002-064 Quad Ring Gasket, VITON®, CF40
012-328 Gasket, Copper, CF40
070-0237 O-ring, VITON®, 2.54 cm (1 in.) bolt
211-003 Clamping ring DN 32-40 ISO-KF
211-070 Centering ring DN 40 ISO-KF,SS/FPM
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