Edge™ CDG100D2 1 … 1000Torr / mbar

 

INFICON Edge Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications and optional EtherCAT fieldbus interface. The innovative heating concept enables a cool to the touch surface and saves valuable tool space. INFICON Edge is the smallest vacuum measurement instrument of its kind.

Benefits

  • Compact, saves valuable tool space
  • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical Applications

  • CVD, Etch, PVD and other semiconductor production processes
  • tina__e1 CDG100D2 Edge Massbild mit EtherCAT.png

Specifications

Type 1000 ... 500 Torr / mbar 200 ... 1 Torr / mbar
Accuracy (1) % of reading 0.15 0.15
Temperature effect    
on zero percent FS/°C 0.0025 0.0025
on span % of reading / °C 0.02 0.02
Pressure, max. kPa (absolute) 400 260
Resolution percent FS 0.003 0.003
Lowest reading percent FS 0.01 0.01
Lowest suggested reading percent FS 0.05 0.05
Lowest suggested control pressure percent FS 0.5 0.5
Temperature    
Sensor °C 100 100
Operation (ambient) (5) °C +10 … +50 +10 … +50
Bakeout at flange °C ≤110 ≤110
Storage °C –20 … +65 –40 … +65
Supply voltage +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%)
Power consumption    
During Heat up W ≤20 ≤20
At operating temperature W ≤14 ≤14
Output signal (analog) V (dc) 0 … +10 0 … +10
Response time (2) ms 30 30
Degree of protection IP 40 IP 40
Standards    
CE conformity EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance (5) SEMI S2  
Electrical connection D-sub, 15 pole, male D-sub, 15 pole, male
Setpoint    
Number of setpoints 2 (SP1,SP2) 2 (SP1,SP2)
Relay contact ≤30 ≤30
Hysteresis percent FS 1 1
Diagnostic port    
Protocol RS232-C RS232-C
Read pressure, status, ID pressure, status, ID
Set set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))
Internal volume    
I. volume 1/2'' tube cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
I. volume 8 VCR® cm³ (in.³) 4.2 (0.26) 4.2 (0.26)
Weight    
Weight 1/2'' tube g 837 837
Weight DN 16 ISO KF g 852 852
Weight DN 16 CF-R g 875 875
Weight 8 VCR® g 897 897
 
EtherCAT    
Protocol EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT
Communication standards ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"
Data rate Kbps 100000 100000
Node address Explicit Device Identification Explicit Device Identification
Physical layer 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3)
Digital functions read pressure, status, ID pressure, status, ID
Digital functions set set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset
Process data Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping
Mailbox (CoE) SDO requests, responses and information SDO requests, responses and information
EtherCAT connector RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT
Cable shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher
Cable length m (ft.) ≤100 (330) ≤100 (330)
Connector for CDG (analog output, supply voltage, setpoints) D-sub, 15 pin, male D-sub, 15 pin, male

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.

(2) Increase 10 … 90 percent FS  

(3) For pressure control type only

(4) 18% Cr, 10% Ni, 3% Mo, 69% Fe

(5) Ambient temperatures > 40°C may increase surface temperature above SEMI S2 compliance levels

Part Number

CDG100D2 Edge PIM 2016_04_18.png
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