Cygnus® 2 Thin Film Deposition Controller

The Best Measurement Precision Possible for OLED Applications

Cygnus 2 Thin Film Deposition Controller provides exceptional value by combining the proven performance of INFICON thin film controllers with unique features, all designed for you to achieve the most from your OLED process. Cygnus 2 uses our ModeLock frequency measurement system to provide stable, high-resolution rate and thickness measurement with an industry-leading rate resolution of .00433 Å/s every 1/10 second. No other quartz crystal controller has the performance, quality, and features of Cygnus 2, allowing you to make excellence repeatable.

Features

  • INFICON ModeLock technology ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
  • Auto Z improves thickness accuracy by automatically determining the Z-ratio as material is deposited
  • Up to six sources can be controlled simultaneously, independently or in any combination by one Cygnus 2, relieving the need for two or three controllers
  • Color TFT LCD display makes it easy to see what’s going on with your process
  • 10 Hz measurement
  • +/-0.0035 Hz over 100ms sample
  • USB data storage for screen shots, recipe storage and data logging
  • Thickness summing of multiple sources
  • Measurement rate averaging for low density, very low rate materials (up to 30 seconds for use with stable sources for very low rate OLED dopant material deposition)
  • Display rate resolution of up to 0.001Å
  • 4 meter XIU option provides the ability to use long in-vacuum sensor cables for large systems
  • Non-deposit control allows for continuous source control as substrates are cycled through the deposition chamber
  • 6 DAC outputs standard, 6 additional optional for source control, rate or thickness monitoring
  • Optional Ethernet communications
  • RoHS compliant

Specifications

Type Cygnus 2
Measurement Performance  
Frequency resolution ±0.0035 Hz @ 6 MHz
Thickness and rate resolution/measurement (1) ±0.00433 Å
Measurement frequency range 6.0 to 4.5 MHz (fixed)
Thickness accuracy (2) 0.5%
Measurement interval 0.10 s
Multiple measurement averaging 0.1, 0.4, 1.0, 4.0, 10.0, 20.0, and 30.0 sec. averaging allowed
Design Features  
Multiple sensor measurement yes (up to 6 sensors)
Auto Z yes
Co-deposition yes (up to 6 sensors)
Process Recipe & Data Management  
Material programs 6 independent materials
USB memory yes
Data logging yes
Hardware Features  
Sensors (3)  
Single 6
Dual w/CrystalTwo® 6 (with one CrystalTwo Switch per sensor input)
CrystalSix® 6
Crystal 12® 6
Generic 6
Source Controls  
Number of sources (4) up to 6
Source control voltages 0 to +/-10 V, adjustable
Output resolution 15 bits over full range (0 to 10V)
Crucible positions 64
Inputs / Outputs  
Inputs 14 standard, up to 28 optional; TTL/CMOS logic compatible or closure to ground
Outputs 8 standard, up to 24 optional programmable SPST relays rated at 30 V(dc) or 30 V(ac) RMS or 42 V peak @ 2.5 amps; 14 optional TTL outputs
Recorder output (4) 0 to +10 V, adjustable
Logic statements 100 fully programmable; up to 5 actions, 5 events per statement
Communications  
Standard RS232
Optional Ethernet
Display  
Thickness resolution

1 Å for 0 to 9.999 kÅ

10 Å for 10.00 to 99.99 kÅ

100 Å for 100.0 to 999.9 kÅ

1 kÅ for 1000 to 9999 kÅ

Rate resolution

0.001 for 0 to 9.999 Å/s

0.01 for 0 to 99.99 Å/s

0.1 for 100 to 999.9 Å/s

Operation  
Power requirements

100 – 230 V (ac) +/- 15%

50 / 60 Hz +/- 3 Hz

Operating temperature 0 to 50 C (32 to 122 F)
Dimensions, excluding mounts (h x w x d) 5.25” x 19” x 13” (133mm x 483mm x 330 mm)
Weight 13 lbs (5.9 kg)

(1) Tooling/density = 100/1, fundamental frequency = 6 MHz

(2) Varies according to process; figures reflect typical accuracy

(3) Maximum configuration of each type

(4) Cygnus 2 has 6 DAC outputs standard, 6 more can be added as an option.  Any of the 12 can be configured as source control voltages or recorder outputs however the number of sources that can be controlled simultaneously is 6

Part Number

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Accessories

Name Description
Front Load Single Sensor Front Load Single Sensor
Front Load Dual Sensor Front Load Dual Sensor
Cool Drawer Single Sensor Cool Drawer Single Sensor
Cool Drawer Dual Sensor Cool Drawer Dual Sensor
ALD Sensor ALD Sensor
UHV Bakeable Sensor UHV Bakeable Sensor
Sputtering Sensor Sputtering Sensor
CrystalSix® Sensor CrystalSix® Sensor
Crystal 12® Sensor Crystal 12® Sensor
RSH-600 Rotary Sensor RSH-600 Rotary Sensor
Part Number Description
755-262-G1 Handheld Power Controller (for manual power control)
779-220-G1 CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables
779-220-G2 CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables
Oscillator kits (Includes oscillator and cables)
781-611-G15 XIU PKG with 4.6 m (15 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G30 XIU PKG with 9.1 m (30 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G50 XIU PKG with 15.2 m (50 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G100 XIU PKG with 30.5 m (100 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G15 4m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G30 4m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G50 4 m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G100 4m XIU with 30.5 m (100 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G15 4m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G30 4m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G50 4m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G100 4m XIU PKG with 30.5 m (100 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
Oscillator Only (No cables included)
781-600-G1 XIU (oscillator) - For XIU to sensor head cable lengths of 15 to 183 cm (6 to 72 in.) - For use with Cygnus 2, IC6, or XTC/3
781-600-G2 XIU (oscillator) - for XIU to sensor head cable lengths of 3 to 4 m (118 to 157 in.) - For use with Cygnus 2 or IC6
Cables
755-257-G6 15.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough
600-1261-P15 4.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU
600-1261-P30 9.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P50 15.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P100 30.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU

Consumables

Name Description
Quartz Monitor Crystals Quartz Monitor Crystals
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