Cube™ CDGsci

 

 

The high end INFICON Cube Capacitance Diaphragm Instrument is the most accurate (≤ 0.025 % Rd accuracy; ≤ 50 ppm FS Repeatability) and most stable vacuum gauge available (< 5 ppm FS/ °C temperature stability; < 70 ppm FS/ year long term stability). Cube is designed as a pure reference device to standardize vacuum measurement systems and is the only choice for vacuum research applications. The proven INFICON temperature controlled, corrosion resistant ultrapure ceramic sensor is the heart of the Cube`s outstanding performance. Cube sets new standards in modern communication and user flexibility with a 20 Bit analog output and RS232-C, TCP / IP and HTML digital output connected through wired Ethernet interface. Each device comes with a quality assurance certificate, hand-signed by the Cube’s leading product researchers. Delivery in a reusable hard shell suit case for storage or shipment to calibration laboratories underlines its professonality.

Benefits

  • True high precision pressure measurement – Ceramic technology
  • Full stable output – Proven by PTB
  • Flexible communication – Various modern interfaces
  • All functions integrated – No controller required
  • Direct mounting to chamber – Optimized center of gravity
  • Transportation without isolation valve possible

Typical Applications

  • Transfer standard
  • Main reference gauge
  • Research
  • In-house standard
  • Cube_dim.gif

Specifications

Type 1000 Torr 100 ... 1 Torr 100mTorr
Accuracy (1) % of reading 0.025 0.025 0.05
Temperature effect      
on zero percent FS/°C 0.0005 0.0005 0.005
on span % of reading / °C 0.001 0.001 0.01
Pressure, max. bar (absolute) 3 2.5 1.5
Lowest reading percent FS 0.01 0.01 0.01
Lowest suggested reading percent FS 0.05 0.05 0.05
Temperature      
Operation (ambient) °C +10 … +40 +10 … +40 +10 … +40
Storage °C –10 … +50 –10 … +50 –10 … +50
Supply voltage +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%)
Power consumption      
During Heat up W ≤15 ≤15 ≤12
At operating temperature W ≤10 ≤10 ≤8
Output signal (analog) V (dc) 0 … +10 0 … +10 0 … +10
Response time (2) ms 100 100 100
Degree of protection IP 40 IP 40 IP 40
Standards      
CE conformity EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance SEMI S2 SEMI S2 SEMI S2
Electrical connection D-sub, 15 pole, male; 2 x LEMO Coax; Ethernet FCC D-sub, 15 pole, male; 2 x LEMO Coax; Ethernet FCC D-sub, 15 pole, male; 2 x LEMO Coax; Ethernet FCC
Setpoint      
Number of setpoints 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2)
Relay contact ≤30 ≤30 ≤30
Hysteresis percent FS 1 1 1
Diagnostic port      
Protocol Web pages, REST services, RS232-ASCII Web pages, REST services, RS232-ASCII Web pages, REST services, RS232-ASCII
Read pressure, status, ID pressure, status, ID pressure, status, ID
Set set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (3))
Internal volume      
I. volume DN 16 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
I. volume 8 VCR® cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
Weight      
Weight DN 16 ISO KF g 1670 1670 1670
Weight DN 16 CF-R g 1670 1670 1670
Weight 8 VCR® g 1670 1670 1670

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.

(2) Increase 10 … 90 percent FS  

(3) 18% Cr, 10% Ni, 3% Mo, 69% Fe

Part Number

Cube_PN.png
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