Crystal 12® Sensor

Auto Crystal Switching Maximizes Production Time

The INFICON Crystal 12 Sensor replaces its crystals automatically without interrupting your process, when partnered with the INFICON IC6 Thin Film Deposition Controller. Whenever a crystal becomes unstable or fails, IC6 signals the Crystal 12 sensor carousel to immediately rotate a new crystal into position, for continuous deposition rate monitoring. To further minimize downtime, crystals can be preloaded into a second optional carousel, which can then be quickly and easily exchanged with the carousel containing the exhausted crystals, minimizing the time the system is open.

Features

  • Holds 12 crystals with robust, automatic switching to maximize process up-time
  • Easy-to-remove carousel allows fast replacement of all 12 crystals
  • Stable crystal temperature, because crystal switching is pneumatically-driven (competitive units use heat generating motors)
  • Easy-to-remove front deposition shield protects the crystals and carousel from material accumulation, minimizing the need to remove entire sensor for maintenance
  • Optional mounting-post kit can be user-modified to accommodate metric hardware

Specifications

Type Crystal 12 Sensor
Maximum bakeout temp with no water 130°C
Maximum operating isothermal environment temperature with minimum water flow 300° C
Size (maximum envelope) 4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed
Water and air length Standard 30 in. (762 mm)
Crystal exchange Front-loading
Mounting Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (IPN 750-670-G1).
Weight 4.92 lb. (2.23 kg)
Installation Requirements  
Feedthrough

Qty (1) 2-3/4 in. ConFlat® with one coaxial feedthrough, two pass water, one air, IPN 750-685-G1,

or,

Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings

or,

Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-G1

Mounting User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, IPN 750-670-G1, may be purchased for this purpose.
Air and Water Connections User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with Crystal12 accessory kit.)
Utilities Minimum water flow 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa - 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve.
Materials  
Plate, Material Shield, Mechanical Parts, Body and Carousel 304 type stainless steel
Springs, Electrical Contacts Au plated Be-Cu, Au Plated 302 stainless steel
Water and air tubes S-304, 0.125 in. (3.2 mm) O.D. x .016 in. (0.4 mm) Wall Thickness x 30 in. Long (762 mm) seamless stainless steel tubing
Connector Stainless steel
Insulators Teflon, Peek®
Cable Teflon insulated copper plated steel
Crystal 0.550 in. (13.97 mm) diameter
1 in. bolt and Ultra-Torr (compression fitting) terminations:  
Materials 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON®
Temperature Operational environment to 300° C with water cooling or 165° C without
Mounting 1.015 in. ±0.010 in. diameter aperture
CF 40 welded terminations:  
Materials 304 stainless steel, Teflon, ceramic, beryllium nickel
Temperature Operational environment to 450° C with water cooling or 165° C without
Mounting Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min.

Part Number

Crystal12_OrderChart_2013_web-01.png

Accessories

Name Description
QCM Sensor Feedthroughs QCM Sensor Feedthroughs
Crystal 12 Sensor
Part Number Description
750-420-G1 Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors)

Consumables

Name Description
Quartz Monitor Crystals Quartz Monitor Crystals

Spare Parts

Crystal 12 Sensor
Part Number Description
750-276-P3 Actuator cover
750-644-G1 Housing
750-658-G1 Deposition shield
750-286-P2 Pneumatic actuator
750-291-P1 Detent
750-294-P2 Stop ratchet
750-293-P2 Ratchet
750-256-P2 Extension spring
750-252-P2 Spring post
750-649-G1 Electrical connection
750-295-G1 Pawl and actuator
750-258-P2 Bearing Shaft
070-0779 Ball bearing
750-652-G1 Carousel
750-650-P1 Aperture plate (without dowel pin)
070-1253 Dowel pin
750-651-P1 Resistor network support
750-655-P1 Resistor network insulator
750-642-G1 Resistor Network
750-661-P1 Contact terminal (carousel component)
750-656-P1 Crystal insulator (carousel component)
321-038-P6 Leaf spring (carousel component)
750-657-P1 Grounding leaf spring
750-671-P1 Torsion spring
750-626-P1 Spring for sputtering head cover
750-647-P1 Spindle
070-1268 Spindle bearing (spindle component)
070-1254 E-Ring (spindle component)
750-660-P1 Location screw (spindle component)
007-126 0.125 in. x 30 in. (3.175 mm x 762 mm) seamless tubing
070-201 #4 Split lockwasher
084-004 #4-40 X .187 Hex socket head screw
070-398 Retaining ring
070-0867 Shaft spacer
070-170 #2 Split lock washer
070-177 #4-40 X 3.12 Hex head screw
080-038 #0-80 x .375 Phillips pan head screw
082-032 #2 Internal lock washer
082-045 #2-56 x .187 Phillips screw
084-054 #4 Split lock washer
082-022 #2 Flat washer
082-024 #2-56 x .250 Hex socket screw
750-292-P2 Detent spacer
080-013 #0-80 Split washer
080-007-P1 #0-80 x .170 Flat washer
080-009-P1 #0-80 X .188 Socket head screw
084-048 #4-40 x .250 Flat head screw
750-665-P1 #2-56 Torsion spring shoulder screw
084-093 #4-40 x 1.125 Socket head screw
086-084-P2 #6-21 x 1/8 set screw
086-041 #6 Flat washer
086-038 #6 Split lock washer
086-036 #6-32 x 3/8 socket head screw
In-vacuum cables
321-039-G12 In-vacuum cable, 15.2 cm (6 in.)
007-252 In-vacuum cable, 30.5 cm (12 in.)
321-039-G11 In-vacuum cable, 61.0 cm (24 in.)
007-044 In-vacuum cable, 78.1 cm (30.75 in.)
007-059 In-vacuum cable, 91.4 cm (36 in.)
007-061 In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller
321-039-G13 In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller
321-039-G14 In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller
321-039-G15 In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU
321-039-G16 In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU
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