BPG400 ATM to Ultra-High Vacuum Gauge

 

The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package.

This Bayard Hot Ion Pirani combination Gauge BPG400 series direct replacement for the ITR 90 series:

 

Part-NoTypPart-NoTyp
353-500BPG400DN 25 ISO-KF=120 90ITR 90DN 25 ISO-KF
353-502BPG400DN 40 CF-R=120 92ITR 90DN 40 CF-R
353-505BPG400-SPProfiBus, DN 25 KF=230 030ITR 90DN 25 ISO-KF
353-506BPG400-SPProfiBus, DN 40 CF-R230 031ITR 90DN 40 CF-R
353-501BPG400LCD, DN 25 ISO-KF=120 91ITR 90DN 25 ISO-KF Displ.
353-503BPG400LCD, DN 40 CF-R=120 94ITR 90DN 40 CF-R Displ.
354-490BPG400Spare-Sensor DN 25 ISO-KF=E 121 02ITR 90Spare-Sensor IE90 DN 25 KF
354-491BPG400Spare-Sensor DN 40 CF-R=E 121 03ITR 90Spare-Sensor IE90 DN CF-R

 

Benefits

  • direct replacement for ITR 90 Vacuum Transmitters
  • Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
  • Long-life yttrium oxide coated iridium filament
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance
  • General vacuum measurement and control in the low to ultra high vacuum range

Typical Applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

News

Direct replacement for ITR 90 Vacuum Transmitters
  • BPG400 Bayard Alpert Piran Gauge

Specifications

Type BPG400
Measurement range (air, O2, CO, N2) 5×10-10 … 1000
Accuracy  
10-8 … 10-2 mbar % of reading ±15
Repeatability  
10-8 … 10-2 mbar % of reading 5
Degas (1)  
p < 7.2 × 10-6 mbar electron bombardment, max. 3 min
Pressure, max. bar (absolute) 2
Temperature  
Operation (ambient) °C 0 … +50
Storage °C -20 … +70
Bakeout at flange with extension °C 150
Bakeout at flange without extension °C 80
Bakeout electronics removed °C 150
Supply voltage +20 … +28
Output signal analog  
Output signal V 0 … +10
Measurement range V +0.774 … +10
Voltage vs. pressure volts per decade 0.75
Error signal V 0.3 / 0.5
Load impedance, min. kΩ 10
Interface (digital) (2) RS232C
Electrical connection D-Sub, 15-pin, male
Cable length, max. (3) m (ft.) 100 (330)
Materials exposed to vacuum Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass
Internal volume KF / CF cm³ (in.³) 24 (1.46) / 34 (2.1)
Weight KF / CF g 285 / 550
Degree of protection IP30
Profibus DP  
Baud rates 9.6 / 19.2 / 93.75 / 187.5 / 500
Address 2 switches (address 00 - 127) or network programmable
Digital functions read pressure, select units: Torr, mbar, Pa; degas function, Pirani full scale adjust, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information
Analog functions 0 … 10 V analog output pressure indication, two setpoint relays A + B
Setpoint relays: Number of setpoints 2
Setpoint relays: Range mbar 1×10-9 … 100
Setpoint relays: Relay contact n.o., potential free
Setpoint relays: Hysteresis % of reading 10
Setpoint relays: Contact rating 60
Connector for Profibus DP D-Sub, 9-pin, female
Connector for BPG (analog output, supply voltage, setpoints) D-Sub, 15-pin, male
DeviceNet™  
Protocol DeviceNet™, group 2 slave only
Data rate switch kBaud 125, 250, 500 or network programmable
Cable length 125 kbps m (ft.) 500 (1650)
Cable length 250 kbps m (ft.) 250 (825)
Cable length 500 kbps m (ft.) 100 (330)
MAC ID 2 switches (address 00 - 63) or network programmable
Digital functions read pressure, select units: Torr, mbar, Pa; degas function, Pirani full scale adjust, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information
Analog functions 0 … 10 V analog output pressure indication, two setpoint relays A + B
Specification DeviceNet™ "Vacuum Gauge Device Profile"
Device type ''CG'' for combination gauge
I / O slave messaging polling only
Setpoint relays: Number of setpoints 2
Setpoint relays: Range mbar 1×10-9 … 100
Setpoint relays: Relay contact n.o., potential free
Setpoint relays: Hysteresis % of reading 10
Setpoint relays: Contact rating 60
Supply voltage for DeviceNet™ +11 … +25
Supply voltage for gauge +20 … +28
Connector for DeviceNet™ Microstyle, 5-pin
Connector for BPG (analog output, supply voltage, setpoints) D-Sub, 15-pin, male

1) Reduced accuracy during degas

2) Simultaneous use of RS232C or VGC40x controller series and Fieldbus is not allowed

3) For RS232C operation <30m

Part Number

BPG400
Part Number Description
353-500 BPG400 DN 25 ISO-KF
353-501 BPG400 LCD, DN 25 ISO-KF
353-502 BPG400 DN 40 CF-R
353-503 BPG400 LCD, DN 40 CF-R
353-505 BPG400-SP PBus, DN 25 ISO-KF
353-506 BPG400-SP PBus, DN 40 CF-R
354-490 Spare sensor head BPG400, DN 25 ISO-KF
354-491 Spare sensor head BPG400, DN 40 CF-R
353-511 Power supply BPG400 24VDC
353-502-A BPG400 BA Pirani Gauge; DN 40 CF-R
353-500-11 BPG400 BA Pirani Gauge; DN 25 ISO-KF
353-500-I0 BPG400 BA Pirani Gauge; DN 25 ISO-KF
354-498 Spare electronic BPG400 without Display
354-499 Spare electronic BPG400 with Display

Accessories

BPG400
Part Number Description
353-510 100 mm sensor extension tube
353-511 Power supply BPG400 24VDC
353-512 Baffle for BPG400
211-113 Centering ring with baffle DN 25 KF
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