BPG402-Sx ATM to Ultra-High Vacuum Gauge

 

The INFICON Bayard-Alpert Pirani Combination Gauge, BPG402-S, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG402-S with two yttrium oxide coated iridium filaments for affordable and repeatable process to base pressure measurements in one economical package. Sensing elements with on-board calibration data guarantees high reproducibility when exchanging sensors.

Benefits

  • Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • Pirani interlock protects the filament from premature burnout
  • Two long-life yttrium oxide coated iridium filaments
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
  • RoHS compliance

Typical Applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

News

NEW! With EtherCAT digital interface available now !

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Specifications

Type BPG402-S
Measurement range (air, O2, CO, N2) 5×10-10 … 1000
Accuracy  
10-8 … 10-2 mbar % of reading ±15
Repeatability  
10-8 … 10-2 mbar % of reading 5
Degas (1)  
p < 7.2 × 10-6 mbar electron bombardment, max. 3 min
Pressure, max. bar (absolute) 2
Temperature  
Operation (ambient) °C 0 … +50
Storage °C -20 … +70
Bakeout at flange without electronics BPG402-S °C 80
Bakeout at flange without electronics BPG402-SL °C 150
Supply voltage +20 … +28
Output signal analog  
Output signal V 0 … +10
Measurement range V +0.774 … +10
Voltage vs. pressure volts per decade 0.75
Error signal V 0.1 / 0.3 / 0.5
Load impedance, min. kΩ 10
Setpoint relay  
Number of setpoints 1
Range mbar 1×10-9 … 100
Relay contact n.o., potential free
Hysteresis % of reading 10
Contact rating ≤30
Digital functions degas
Interface (digital) (2) RS232C
Emission control automatic / manual via interface
Filament two Yt2O3 coated Ir
Filament status / relay LED / relay
Electrical connection D-Sub, 15-pin, male
Cable length, max. (3) m (ft.) 100 (330)
Materials exposed to vacuum Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass
Internal volume KF / CF cm³ (in.³) 24 (1.46) / 34 (2.1)
Weight KF / CF g 450 / 710
Degree of protection IP30
Profibus DP  
Baud rates 9.6 / 19.2 / 93.75 / 187.5 / 500
Address 2 switches (address 00 - 127) or network programmable
Digital functions read pressure, select units: Torr, mbar, Pa; emission control, degas function, monitor gauge status, filament status, safe state allows definition of behavior in case of error, detailed alarm and warning information
Analog functions 0 … 10 V analog output pressure indication, two setpoint relays A + B
Setpoint relays: Number of setpoints 2
Setpoint relays: Range mbar 1×10-9 … 100
Setpoint relays: Relay contact n.o., potential free
Setpoint relays: Hysteresis % of reading 10
Setpoint relays: Contact rating ≤30
Connector for Profibus DP D-Sub, 9-pin, female
Connector for CDG (analog output, supply voltage, setpoints) D-Sub, 15-pin, male
DeviceNet™  
Protocol DeviceNet™, group 2 slave only
Data rate switch kBaud 125, 250, 500 or network programmable
Cable length 125 kbps m (ft.) 500 (1650)
Cable length 250 kbps m (ft.) 250 (825)
Cable length 500 kbps m (ft.) 100 (330)
MAC ID 2 switches (address 00 - 63) or network programmable
Digital functions read pressure, select units: Torr, mbar, Pa; emission control, degas function, monitor gauge status, filament status, safe state allows definition of behavior in case of error, detailed alarm and warning information
Analog functions 0 … 10 V analog output pressure indication, two setpoint relays A + B
Specification DeviceNet™ "Vacuum Gauge Device Profile"
Device type ''CG'' for combination gauge
I / O slave messaging polling only
Setpoint relay: Number of setpoints 2
Setpoint relays: Range mbar 1×10-9 … 100
Setpoint relays: Relay contact n.o., potential free
Setpoint relays: Hysteresis % of reading 10
Setpoint relays: Contact rating ≤30
Supply voltage for DeviceNet™ +11 … +25
Supply voltage for gauge +20 … +28
Connector for DeviceNet™ Microstyle, 5-pin
Connector for BPG (analog output, supply voltage, setpoints) D-Sub, 15-pin, male
EtherCAT  
Protocol EtherCAT protocol specialized for EtherCAT
Communication standards ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"
Node address Explicit Device Identification
Physical layer 100BASE-Tx (IEEE 802.3)
Digital functions EtherCAT read pressure, select units: Torr, mbar, Pa emission control, degas function monitor gauge status, filament status safe state allows definition of behavior in case of error detailed alarm and warning information
Process data Fixed PDO mapping and configurable PDO mapping
Mailbox (CoE) SDO requests, responses and information
EtherCAT connector RJ45, 8-pin (socket), IN and OUT
Cable shielded Ethernet CAT5e or higher
Cable length m (ft.) ≤100 (330)

1) Reduced accuracy during degas

2) Simultaneous use of RS232C or VGC40x series controllers and Fieldbus is not allowed

3) For RS232C operation <30m

Part Number

BPG402-S
Part Number Description
353-570 BPG402-S DN 25 ISO-KF
353-571 BPG402-S DN 40 CF-R
353-572 BPG402-S LCD, DN 25 ISO-KF
353-573 BPG402-S LCD, DN 40 CF-R
353-574 BPG402-SP PBus, DN 25 ISO-KF
353-575 BPG402-SP PBus, DN 40 CF-R
353-576 BPG402-SD DNet, DN 25 ISO-KF
353-577 BPG402-SD DNet, DN 40 CF-R
353-578 BPG402-SL long tube DN 40 CF-R
353-590 BPG402-SE ECAT, DN 25 ISO-KF
353-591 BPG402-SE ECAT, DN 40 CF-R

Accessories

BPG402-S
Part Number Description
353-511 Power supply BPG400 24VDC
353-512 Baffle for BPG400
211-113 Centering ring with baffle DN 25 KF

Spare Parts

BPG402-S
Part Number Description
354-494 Spare sensor head BPG402 DN 25 ISO-KF
354-495 Spare sensor head BPG402 DN 40 CF-R
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