BPG400 ATM to Ultra-High Vacuum Gauge

 

The INFICON Bayard-Alpert Pirani Combination Gauge, BPG400, functions as two gauges in a single compact unit measuring from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere). Combining technologies reduces the complexity of installation, setup, and integration. Choose the BPG400 for affordable and repeatable process to base pressure measurements in one economic package.

Benefits

  • Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
  • Long-life yttrium oxide coated iridium filament
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance
  • General vacuum measurement and control in the low to ultra high vacuum range

Typical Applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range
  • BPG400 Bayard Alpert Piran Gauge

Specifications

Type BPG400
Measurement range (air, O2, CO, N2) 5×10-10 … 1000
Accuracy  
10-8 … 10-2 mbar % of reading ±15
Repeatability  
10-8 … 10-2 mbar % of reading 5
Degas (1)  
p < 7.2 × 10-6 mbar electron bombardment, max. 3 min
Pressure, max. bar (absolute) 2
Temperature  
Operation (ambient) °C 0 … +50
Storage °C -20 … +70
Bakeout at flange with extension °C 150
Bakeout at flange without extension °C 80
Bakeout electronics removed °C 150
Supply voltage +20 … +28
Output signal analog  
Output signal V 0 … +10
Measurement range V +0.774 … +10
Voltage vs. pressure volts per decade 0.75
Error signal V 0.3 / 0.5
Load impedance, min. kΩ 10
Interface (digital) (2) RS232C
Electrical connection D-Sub, 15-pin, male
Cable length, max. (3) m (ft.) 100 (330)
Materials exposed to vacuum Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass
Internal volume KF / CF cm³ (in.³) 24 (1.46) / 34 (2.1)
Weight KF / CF g 285 / 550
Degree of protection IP30
Profibus DP  
Baud rates 9.6 / 19.2 / 93.75 / 187.5 / 500
Address 2 switches (address 00 - 127) or network programmable
Digital functions read pressure, select units: Torr, mbar, Pa; degas function, Pirani full scale adjust, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information
Analog functions 0 … 10 V analog output pressure indication, two setpoint relays A + B
Setpoint relays: Number of setpoints 2
Setpoint relays: Range mbar 1×10-9 … 100
Setpoint relays: Relay contact n.o., potential free
Setpoint relays: Hysteresis % of reading 10
Setpoint relays: Contact rating 60
Connector for Profibus DP D-Sub, 9-pin, female
Connector for BPG (analog output, supply voltage, setpoints) D-Sub, 15-pin, male
DeviceNet™  
Protocol DeviceNet™, group 2 slave only
Data rate switch kBaud 125, 250, 500 or network programmable
Cable length 125 kbps m (ft.) 500 (1650)
Cable length 250 kbps m (ft.) 250 (825)
Cable length 500 kbps m (ft.) 100 (330)
MAC ID 2 switches (address 00 - 63) or network programmable
Digital functions read pressure, select units: Torr, mbar, Pa; degas function, Pirani full scale adjust, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information
Analog functions 0 … 10 V analog output pressure indication, two setpoint relays A + B
Specification DeviceNet™ "Vacuum Gauge Device Profile"
Device type ''CG'' for combination gauge
I / O slave messaging polling only
Setpoint relays: Number of setpoints 2
Setpoint relays: Range mbar 1×10-9 … 100
Setpoint relays: Relay contact n.o., potential free
Setpoint relays: Hysteresis % of reading 10
Setpoint relays: Contact rating 60
Supply voltage for DeviceNet™ +11 … +25
Supply voltage for gauge +20 … +28
Connector for DeviceNet™ Microstyle, 5-pin
Connector for BPG (analog output, supply voltage, setpoints) D-Sub, 15-pin, male

1) Reduced accuracy during degas

2) Simultaneous use of RS232C or VGC40x controller series and Fieldbus is not allowed

3) For RS232C operation <30m

Part Number

BPG400
Part Number Description
353-500 BPG400 DN 25 ISO-KF
353-500-11 BPG400 BA Pirani Gauge; DN 25 ISO-KF
353-500-I0 BPG400 BA Pirani Gauge; DN 25 ISO-KF
353-502-A BPG400 BA Pirani Gauge; DN 40 CF-R
354-498 Spare electronic BPG400 without Display
354-499 Spare electronic BPG400 with Display
353-501 BPG400 LCD, DN 25 ISO-KF
353-502 BPG400 DN 40 CF-R
353-503 BPG400 LCD, DN 40 CF-R
353-505 BPG400-SP PBus, DN 25 ISO-KF
353-506 BPG400-SP PBus, DN 40 CF-R
353-507 BPG400-SD DNet, DN 25 ISO-KF
353-508 BPG400-SD DNet, DN 40 CF-R

Accessories

BPG400
Part Number Description
353-510 100 mm sensor extension tube
353-512 Baffle for BPG400
211-113 Centering ring with baffle DN 25 KF

Spare Parts

BPG400
Part Number Description
354-490 Spare sensor head BPG400, DN 25 ISO-KF
354-491 Spare sensor head BPG400, DN 40 CF-R
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