BAG402 Medium to Ultra-High Vacuum Gauge

The INFICON single Bayard-Alpert Hot Ion Gauge BAG402 covers a wide measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr). Choose the INFICON BAG402 for affordable and repeatable process to base pressure measurements in a compact active gauge package. The unique, supported dual filaments offer superior accuracy, longtermstability and longevity.

Benefits

  • Measurement range from 5×10-10 mbar to 2.7×10-2 mbar (3.75×10-10 Torr to 5×10-2 Torr)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • Overpressure detection protects the filament from premature burnout
  • Two long-life yttrium oxide coated iridium filaments
  • Automatic emission current selection reduces control complexity
  • Easy to exchange sensing element with on-board calibration data guarantees high reproducibility
  • RoHS compliance

Typical Applications

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range
  • tiba46e1 Dimensioned Drawing.png

Specifications

Type BAG402
Measurement range (air, O2, CO, N2) 5×10-10 … 2.7×10-2
Accuracy  
10-8 … 10-2 mbar % of reading ±15
Repeatability  
10-8 … 10-2 mbar % of reading 5
Degas (1)  
p < 7.2 × 10-6 mbar electron bombardment, max. 3 min
Pressure, max. bar (absolute) 2
Temperature  
Operation (ambient) °C 0 … +50
Storage °C -20 … +70
Bakeout at flange without electronics BPG402-S °C 80
Supply voltage +20 … +28
Output signal analog (4)  
Output signal V 0 … +10
Measurement range log / lin V 0 … +9
Voltage vs. pressure volts per decade 1
Error signal V > +10
Load impedance, min. kΩ 10
Secondary analog output none
Setpoint relay  
Number of setpoints none
Range  
Relay contact  
Hysteresis  
Contact rating  
Digital functions degas and emission
Interface (digital) (2) Diagnosis port
Emission control manual
Filament two Yttriumoxid (Y2O3) coated Iridium (Ir)
Filament status / relay LED / relay
Electrical connection D-Sub, 9-pin, male
Cable length, max. m (ft.) 100 (330)
Materials exposed to vacuum Y2O3, Ir, Pt, Mo, NiFe, NiCr, stainless steel, glass
Internal volume KF / CF cm³ (in.³) 24 (1.46) / 34 (2.1)
Weight KF / CF g 450 / 710
Degree of protection IP30

1) Reduced accuracy during degas

2) Simultaneous use of RS232C or VGC40x series controllers and Fieldbus is not allowed

Part Number

BAG402
Part Number Description
353-600 BAG402 DSUB9 KF25
353-601 BAG402 DSUB9 CF40

Accessories

BAG402
Part Number Description
303-333 Diagnostic cable 1.9m (P3)

Spare Parts

BAG402
Part Number Description
354-484 Spare sensor head BAG402 DN 25 ISO-KF
354-485 Spare sensor head BAG402 DN 40 CF-R
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