ALD Sensor

OPTIMUM ACCURACY, UPTIME AND MINIMAL MAINTENANCE FOR ALD APPLICATIONS

INFICON ALD Sensors bring the repeatability, precision, and durability of quartz crystal microbalance (QCM) measurement to atomic layer deposition (ALD). The ALD Sensor can withstand temperatures up to 450ºC, and is designed to operate in the harsh environment of an ALD application. The exposed crystal electrode is fully grounded to effectively eliminate any potential issues with electrical interference.

Designed Specifically for ALD

A unique feature of the INFICON ALD Sensor is a gas tube used to purge the back of the crystal and sensor cavity with an inert gas, typically nitrogen. This keeps reactive chamber gases from entering the sensor head and keeps the back of the crystal and electrical contacts free of deposition material. This technique allows for in situ measurement in systems where a standard QCM is not suitable.

Feedthrough and Feedthrough Connection

INFICON ALD Sensors are available in custom welded lengths or with compression fittings for adjustable length without the need for brazing or welding. All configurations use a 2 ¾ in. (CF40) ConFlat® flange feedthrough.

High Temperature Crystals for More Accurate Measurements

The INFICON ALD Sensor can achieve the best measurement accuracy and lower frequency noise in high temperature applications when used with INFICON’s new high temperature quartz crystals. These high temperature crystals are optimized for 120, 240, and 285°C applications, so you always have the right crystal for your process. Crystals optimized for other temperatures may be available. Contact INFICON for your needs.

Benefits

  • Compatible with most ALD process temperatures
  • Significantly reduces maintenance
  • Maximizes system uptime
  • Maximizes measurement accuracy
  • Stable readings with low noise at high process temperatures

Features

  • Operating temperature up to 450°C
  • Gas purge line keeps back of crystal free of depsotion material
  • Welded Conflat flange (CF40) option
  • O-ring compression fitting option
  • High temperature crystals available

Typical Applications

  • Atomic Layer Deposition (ALD)
  • Adjustable ALD Sensor dimensions.gif
  • Welded ALD Sensor dimensions.gif

Specifications

Type Welded ALD Sensor Adjustable ALD Sensor
Maximum temperature 450° C 130° C
Feedthrough 2.75 in. ConFlat® 2.75 in. ConFlat® equipped with O-ring compression fittings
Sensor/feedthrough connection Welded (no fillers) O-ring compression fittings
Gas and coax tubes Gas:
3.2 mm (1/8 in.) O.D. (vacuum side)

6.4 mm (1/4 in.) O.D. (atmosphere side)

Coax:
4.8 mm (3/16 in.) O.D.
Gas:
3.2 mm (1/8 in.) O.D.

Coax:
4.8 mm (3/16 in.) O.D.
Sensor head size (maximum envelope) 34 x 35 x 24 mm
(1.35 x 1.38 x 0.94 in.)
34 x 35 x 24 mm
(1.35 x 1.38 x 0.94 in.)
Crystal exchange Front loading, self-contained package
Cam-type locking handle
Front loading, self-contained package
Cam-type locking handle
Mounting Four #4-40 tapped holes on back of sensor body Four #4-40 tapped holes on back of sensor body
Materials    
Body and holder 304 stainless steel 304 stainless steel
Springs Molybdenum and Inconel X-750 Molybdenum and Inconel X-750
Gas and coax tubes Seamless 304 stainless steel Seamless 304 stainless steel
Other mechanical parts 18-8 or 304 stainless steel 18-8 or 304 stainless steel
Insulators >99% Al2O3 in vacuum >99% Al2O3 in vacuum
Wire 1) Ni (in vacuum)
2) Ni plated Cu (elsewhere)
1) Ni (in vacuum)
2) Ni plated Cu (elsewhere)
Braze Vacuum process high temperature Ni-Cr alloy Vacuum process high temperature Ni-Cr alloy
O-ring compression fittings N/A 304 stainless steel, Viton®

Part Number

Welded ALD Sensor
Part Number Description
750-713-G4 Welded ALD Sensor
Adjustable ALD Sensor
Part Number Description
750-717-G2 Adjustable ALD Sensor, length adjustable from 101.6 to 393.7 mm (4 to 15.5 in.)
750-717-G4 Adjustable ALD Sensor, length adjustable from 101.6 to 901.7 mm (4 to 35.5 in.)

Accessories

Part Number Description
750-1058-G10 120° C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of 10
750-1059-G10 240° C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of 10
750-1060-G10 285° C optimized crystals, 6 MHz, 14 mm (0.55 in.), gold, pack of 10

Consumables

Name Description
Quartz Monitor Crystals Quartz Monitor Crystals

Spare Parts

Part Number Description
007-007 Retainer spring (for crystal holder)
007-064 Ceramic retainer
007-094 Clamping spring
007-095 Handle
007-098 Female Connector (includes ferrules and nut)
007-099 Bakeable head contact
007-100 Insulator for BNC
007-103 Insulator for bakeable head contact
007-104 BNC Body
007-147 #4-40 X 3/8 screw
007-228 #4-40 X 5/8 screw
007-267-P2 Spreader bar
007-268-P1 Shoulder washer
007-269-P1 Shoulder washer
070-201 #4 Split lockwasher
084-069-P1 #4-40 x 3/16 screw
750-018-P3 Split clamp
750-018-P5 Split clamp
750-218-G1 Cyrstal holder
send to a friend