Thin Film Deposition and Electron Beam Gun Control
INFICON market-leading thin film deposition controllers, monitors and QCM measurement instruments control deposition rate and thickness of the most complex processes with unsurpassed measurement speed and precision. Enhanced software and logic I/O features allow our thin film deposition controllers/QCM measurement instruments to be fully integrated into the vacuum system for automatic process control. To control less complex processes, use INFICON economical, precision controllers, monitors and QCM measurement instruments that measure films with 100 times more precision than conventional techniques.
The typical QCM system includes a quartz crystal which is the sensing device, a crystal holder (sensor) which holds the crystal and provides electrical connections to the crystal, an oscillator (or XIU for ModeLock instruments) which drives the crystal, and a controller or monitor that reads the deposition rate and thickness and stores process parameters. INFICON provides both complete QCM systems as well as individual components designed for research applications.
From the simplest to the most complex process, INFICON provides superior value.
Deposition ControllersA deposition controller allows rate control of your deposition process using a QCM sensor. From the most basic to the most feature laden, INFICON offers a deposition controller to meet your needs.
EIES is an alternative rate/thickness monitoring technology for certain applications where a QCM is not ideal.
Deposition MonitorsA deposition monitor is similar to a deposition controller, but simpler for applications where no rate control or complex system integration is needed. INFICON Deposition Monitors give you the reliable, industry leading quality you expect from INFICON in a simple, easy to use package.
Electron Beam Gun ControlINFICON, the world leader in QCM technology, now offers electron beam gun control equipment, including sweep controllers, crucible indexers, source controllers, and high voltage power supplies.
Quartz Crystal Sensors and FeedthroughsA sensor houses and cools the quartz crystal and also makes the electrical connection between the crystal and the feedthrough. INFICON sensors are available in a wide range of configurations and are also available in sensor/feedthrough combinations for a complete custom solution!
Quartz Monitor Crystals For Vacuum ApplicationsThe quartz crystal is the rate and thickness sensing element in a QCM system. These crystals are for use in vacuum applications with any standard INFICON monitor or controller and an INFICON (or other make) single, dual, or multi-crystal sensor.
Offering a wide variety of crystals and packaging, INFICON can get you the crystals you want, when you want them.
Quartz Monitor Crystals for Liquid ApplicationsThe standard AT-cut, 1 in. (25.4 mm) diameter crystal is used primarily in research applications with the INFICON RQCM (Research Quartz Crystal Microbalance) and PLO-10i systems. These research crystals are designed for use with INFICON rugged, easy to use crystal holders and are used for in-situ monitoring of deposited films or liquids.