Gas Concentration Monitor
A gas concentration monitor is a simple and reliable way to measure the composition of binary gases. When done properly, measuring precursor and carrier gas ratios to precise levels can effectively reduce process variability and promote efficient use of precursor materials. The wide operating pressure range (200 to 1000 Torr) and high sensitivity make it an indispensable tool for semiconductor applications, including MOCVD, in both R&D and production environments, as well as for many industrial processes.
Binary Gas Concentration MonitorProducts
Discontinued Gas Concentration ControllerDownload manuals for discontinued gas concentration monitor and control products.