RF Sensing Technology
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RF Sensing Technology
Sion™
Non-Invasive, Clamp-On RF Detector Delivers High-Speed Arc Detection and Clean End Point Control for higher yields and reduced Cost of Ownership
Sion™
- Easy retrofit to existing tool set and drop-in replacement for OES-based instrument for endpoint control
- Non-invasive sensor installation
- High-speed data collection (250 kHz) for arc detection
- Eliminates chamber clean under- and over-etching, increasing uptime and reducing cost of gas usage and materials
- Integrated data management with FabGuard
RF Sensing Technology
ADC100
Non- Invasive, high speed, DC arc dection for real-time process control
ADC100
- Software integration to the tool through FabGuard Sensor Integration and Analysis System
- Data collection at 250 kHz per channel
- Custom cables connect to most DC generators
- Detects arcs quickly with pre-defined analysis tools