Transpector® MPH Residual Gas Analyzer

 

UNLOCK YOUR PROCESS

Unparalleled Performance for Increased Yields and Maximum Uptime

The ever increasing price of silicon wafers and demand for finished products means that scrapped wafers cost more than ever before. Thus, understanding your process and monitoring for defects has become a much higher priority in semiconductor fabrication centers. The Transpector MPH Gas Analysis System is designed to unlock your process with industry leading performance for all of your gas analysis applications to help maximize chip yields and minimize tool downtime. Combined with a low overall cost of ownership and high mean-time-between-failures, Transpector MPH helps your bottom line more than any other residual gas analyzer (RGA) on the market.

INFICON has leveraged its expertise in gas analysis process control equipment to create an RGA with industry-leading data collection speed, minimum detectable partial pressure and signal-to-noise ratio. All this, without sacrificing any of the reliability you have come to expect from INFICON Transpector Gas Analyzers.

Features

  • Max. Data Rate of 1.8 ms per point for Analog Scans and Selected Peaks
  • TCP/IP Ethernet connectivity
  • Dual filaments
  • Field replaceable Electron Multiplier
  • Combined anode, cathode and repeller filament kit
  • Shorter sensors minimize installed footprint
  • Nine-decade dynamic range
  • MDPP of <2E-15 Torr (100 amu)
  • Increased Signal-to-Noise ratio
  • Interchangeable sensors and electronics
  • Sensors are assembled, tested and double bagged in a cleanroom environment
  • RoHS Compliant

Specifications

Type MPH100F MPH100M MPH200F MPH200M MPH300F MPH300M
Sensor Length 14.3 cm 19.3 cm 14.3 cm 19.3 cm 14.3 cm 19.3 cm
Mass Range 100 amu 100 amu 200 amu 200 amu 300 amu 300 amu
Detector Type FC FC/EM FC FC/EM FC FC/EM
Sensitivity (FC) 6E-4 A/Torr 6E-4 A/Torr 5E-4 A/Torr 5E-4 A/Torr 4E-4 A/Torr 4E-4 A/Torr
Sensitivity (EM) NA 500 A/Torr NA 500 A/Torr NA 250 A/Torr
Min. Detectable Partial Pressure (4) 3E-13 Torr 2E-15 Torr 4E-13 Torr 3E-15 Torr 5E-13 Torr 4E-15 Torr
Max. Sensor Operating Temp. (FC) 200°C 200°C 200°C 200°C 200°C 200°C
Max. Sensor Operating Temp. (EM) NA 150°C NA 150°C NA 150°C
Filament Type Option (1) Y2O3/Ir Y2O3/Ir Y2O3/Ir Y2O3/Ir Y2O3/Ir Y2O3/Ir
Filament Type Option (2) Tungsten Tungsten Tungsten Tungsten Tungsten Tungsten
Resolution (over entire mass range) <1 amu wide (3) <1 amu wide (3) <1 amu wide (3) <1 amu wide (3) <1 amu wide (3) <1 amu wide (3)
Temperature Coefficient <1% of peak height/°C <1% of peak height/°C <1% of peak height/°C <1% of peak height/°C <1% of peak height/°C <1% of peak height/°C
Max. Data Rate per Point 1.8 ms 1.8 ms 1.8 ms 1.8 ms 1.8 ms 1.8 ms
Zero Blast (@ mass 2) <5 ppm <5 ppm <65 ppm <65 ppm <100 ppm <100 ppm
Max. Operating Pressure 5E-4 Torr 5E-4 Torr 5E-4 Torr 5E-4 Torr 5E-4 Torr 5E-4 Torr
Max. Bakeout Temp. 300 300 300 300 300 300
Power Input 20-30 VDC 20-30 VDC 20-30 VDC 20-30 VDC 20-30 VDC 20-30 VDC

(1) for general applications

(2) for halogen environmental applications

(3) at 10% of peak height

(4) 4 second dwell time

Accessories

MPH100F
Part Number Description
961-021-G1 MPH Power Supply 80 - 250 VAC / 4 ft (1.2m) US plug
961-021-G2 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
600-1190-P8 Ethernet 7m cable
600-1190-P15 Ethernet 15m cable
600-1428-P1 Power Supply Extension Cable- 15 ft (4.5m)
600-1429-P1 Power Supply Extension Cable - 30 ft (9m)
961-417-G1 Ethernet Router 4 port with Push Button Wi-Fi
961-418-G1 Ethernet Switch 8 port
961-702-G1 Pirani Interlock Kit
914-024-G1 Angle Valve Kit, Manual (includes heater)
914-026-G1 MPH Angle Valve Kit, Electropneumatic 24 V(DC) (includes heater)
961-029-G1 MPH Heater Kit 120 VAC
961-029-G2 MPH Heater Kit 230 VAC
MPH100M
Part Number Description
961-021-G1 MPH Power Supply 80 - 250 VAC / 4 ft (1.2m) US plug
961-021-G2 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
600-1190-P8 Ethernet 7m cable
600-1190-P15 Ethernet 15m cable
600-1428-P1 Power Supply Extension Cable- 15 ft (4.5m)
600-1429-P1 Power Supply Extension Cable - 30 ft (9m)
961-417-G1 Ethernet Router 4 port with Push Button Wi-Fi
961-418-G1 Ethernet Switch 8 port
961-702-G1 Pirani Interlock Kit
914-024-G1 Angle Valve Kit, Manual (includes heater)
914-026-G1 MPH Angle Valve Kit, Electropneumatic 24 V(DC) (includes heater)
961-029-G1 MPH Heater Kit 120 VAC
961-029-G2 MPH Heater Kit 230 VAC
MPH200F
Part Number Description
961-021-G1 MPH Power Supply 80 - 250 VAC / 4 ft (1.2m) US plug
961-021-G2 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
600-1190-P8 Ethernet 7m cable
600-1190-P15 Ethernet 15m cable
600-1428-P1 Power Supply Extension Cable- 15 ft (4.5m)
600-1429-P1 Power Supply Extension Cable - 30 ft (9m)
961-417-G1 Ethernet Router 4 port with Push Button Wi-Fi
961-418-G1 Ethernet Switch 8 port
961-702-G1 Pirani Interlock Kit
914-024-G1 Angle Valve Kit, Manual (includes heater)
914-026-G1 MPH Angle Valve Kit, Electropneumatic 24 V(DC) (includes heater)
961-029-G1 MPH Heater Kit 120 VAC
961-029-G2 MPH Heater Kit 230 VAC
MPH200M
Part Number Description
961-021-G1 MPH Power Supply 80 - 250 VAC / 4 ft (1.2m) US plug
961-021-G2 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
600-1190-P8 Ethernet 7m cable
600-1190-P15 Ethernet 15m cable
600-1428-P1 Power Supply Extension Cable- 15 ft (4.5m)
600-1429-P1 Power Supply Extension Cable - 30 ft (9m)
961-417-G1 Ethernet Router 4 port with Push Button Wi-Fi
961-418-G1 Ethernet Switch 8 port
961-702-G1 Pirani Interlock Kit
914-024-G1 Angle Valve Kit, Manual (includes heater)
914-026-G1 MPH Angle Valve Kit, Electropneumatic 24 V(DC) (includes heater)
961-029-G1 MPH Heater Kit 120 VAC
961-029-G2 MPH Heater Kit 230 VAC
MPH300F
Part Number Description
961-021-G1 MPH Power Supply 80 - 250 VAC / 4 ft (1.2m) US plug
961-417-G1 Ethernet Router 4 port with Push Button Wi-Fi
961-021-G2 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
600-1190-P8 Ethernet 7m cable
600-1190-P15 Ethernet 15m cable
600-1428-P1 Power Supply Extension Cable- 15 ft (4.5m)
600-1429-P1 Power Supply Extension Cable - 30 ft (9m)
961-418-G1 Ethernet Switch 8 port
961-702-G1 Pirani Interlock Kit
914-024-G1 Angle Valve Kit, Manual (includes heater)
914-026-G1 MPH Angle Valve Kit, Electropneumatic 24 V(DC) (includes heater)
961-029-G1 MPH Heater Kit 120 VAC
961-029-G2 MPH Heater Kit 230 VAC
MPH300M
Part Number Description
961-021-G1 MPH Power Supply 80 - 250 VAC / 4 ft (1.2m) US plug
961-416-P1 Spare MPH Heating Jacket
961-021-G2 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6 MPH Power Supply 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
600-1190-P8 Ethernet 7m cable
600-1190-P15 Ethernet 15m cable
600-1428-P1 Power Supply Extension Cable- 15 ft (4.5m)
600-1429-P1 Power Supply Extension Cable - 30 ft (9m)
961-417-G1 Ethernet Router 4 port with Push Button Wi-Fi
961-418-G1 Ethernet Switch 8 port
961-702-G1 Pirani Interlock Kit
914-024-G1 Angle Valve Kit, Manual (includes heater)
914-026-G1 MPH Angle Valve Kit, Electropneumatic 24 V(DC) (includes heater)
961-029-G1 MPH Heater Kit 120 VAC
961-029-G2 MPH Heater Kit 230 VAC

Spare Parts

MPH100F
Part Number Description
961-H1FAS MPH Sensor, 100 AMU FC (MPH100F) w/ Y2O3/Ir Filaments
961-H1FBS MPH Sensor, 100 AMU FC (MPH100F) w/ Tungsten Filaments
MP-H10S MPH Electronics Box, 100 AMU FC or EM/FC (MPH100F, MPH100M) w/ Ethernet
961-700-G1 Coated Iridium Filament Kit
961-700-G2 Tungsten Filament Kit
961-701-G1 Coated Iridium Filament Ion Source
961-701-G2 Tungsten Filament Ion Source
961-416-P1 Spare MPH Heating Jacket
914-407-P1 Spare Valve Heating Jacket (required heater power cable if stand alone)
600-1117-P1 Spare Heater Power Cable 120 VAC
600-1117-P2 Spare Heater Power Cable 230 VAC
914-410-P1 Spare Angle Valve, Manual
914-220-G1 Spare Angle Valve, Air Operated
961-206-G2 MPH Extension Kit
961-022-G1 Spare O-Ring and Nut Kit
074-5007-G1 Gas Analysis Product Manuals CD
MPH100M
Part Number Description
961-H1MAS MPH Sensor, 100 AMU EM/FC (MPH100M) w/ Y2O3/Ir Filaments
961-H1MBS MPH Sensor, 100 AMU EM/FC (MPH100M) w/ Tungsten Filaments
MP-H10S MPH Electronics Box, 100 AMU FC or EM/FC (MPH100F, MPH100M) w/ Ethernet
961-700-G1 Coated Iridium Filament Kit
961-700-G2 Tungsten Filament Kit
961-701-G1 Coated Iridium Filament Ion Source
961-701-G2 Tungsten Filament Ion Source
961-2428-G2 Electron Multiplier Replacement Kit
961-416-P1 Spare MPH Heating Jacket
914-407-P1 Spare Valve Heating Jacket (required heater power cable if stand alone)
600-1117-P1 Spare Heater Power Cable 120 VAC
600-1117-P2 Spare Heater Power Cable 230 VAC
914-410-P1 Spare Angle Valve, Manual
914-220-G1 Spare Angle Valve, Air Operated
961-206-G2 MPH Extension Kit
961-205-G2 MPH HPR Extension Kit
961-022-G1 Spare O-Ring and Nut Kit
074-5007-G1 Gas Analysis Product Manuals CD
MPH200F
Part Number Description
961-H2FAS MPH Sensor, 200 AMU FC (MPH200F) w/ Y2O3/Ir Filaments
961-H2FBS MPH Sensor, 200 AMU FC (MPH200F) w/ Tungsten Filaments
MP-H20S MPH Electronics Box, 200 AMU FC or EM/FC (MPH200F, MPH200M) w/ Ethernet
961-700-G1 Coated Iridium Filament Kit
961-700-G2 Tungsten Filament Kit
961-701-G1 Coated Iridium Filament Ion Source
961-701-G2 Tungsten Filament Ion Source
961-416-P1 Spare MPH Heating Jacket
914-407-P1 Spare Valve Heating Jacket (required heater power cable if stand alone)
600-1117-P1 Spare Heater Power Cable 120 VAC
600-1117-P2 Spare Heater Power Cable 230 VAC
914-410-P1 Spare Angle Valve, Manual
914-220-G1 Spare Angle Valve, Air Operated
961-206-G2 MPH Extension Kit
961-022-G1 Spare O-Ring and Nut Kit
074-5007-G1 Gas Analysis Product Manuals CD
MPH200M
Part Number Description
961-H2MAS MPH Sensor, 200 AMU EM/FC (MPH200M) w/ Y2O3/Ir Filaments
961-H2MBS MPH Sensor, 200 AMU EM/FC (MPH200M) w/ Tungsten Filaments
MP-H20S MPH Electronics Box, 200 AMU FC or EM/FC (MPH200F, MPH200M) w/ Ethernet
961-700-G1 Coated Iridium Filament Kit
961-700-G2 Tungsten Filament Kit
961-701-G1 Coated Iridium Filament Ion Source
961-701-G2 Tungsten Filament Ion Source
961-2428-G2 Electron Multiplier Replacement Kit
961-416-P1 Spare MPH Heating Jacket
914-407-P1 Spare Valve Heating Jacket (required heater power cable if stand alone)
600-1117-P1 Spare Heater Power Cable 120 VAC
600-1117-P2 Spare Heater Power Cable 230 VAC
914-410-P1 Spare Angle Valve, Manual
914-220-G1 Spare Angle Valve, Air Operated
961-206-G2 MPH Extension Kit
961-205-G2 MPH HPR Extension Kit
961-022-G1 Spare O-Ring and Nut Kit
074-5007-G1 Gas Analysis Product Manuals CD
MPH300F
Part Number Description
961-H3FAS MPH Sensor, 300 AMU FC (MPH300F) w/ Y2O3/Ir Filaments
961-H3FBS MPH Sensor, 300 AMU FC (MPH300F) w/ Tungsten Filaments
MP-H30S MPH Electronics Box, 300 AMU FC or EM/FC (MPH300F, MPH300M) w/ Ethernet
961-700-G1 Coated Iridium Filament Kit
961-700-G2 Tungsten Filament Kit
961-701-G1 Coated Iridium Filament Ion Source
961-701-G2 Tungsten Filament Ion Source
961-416-P1 Spare MPH Heating Jacket
914-407-P1 Spare Valve Heating Jacket (required heater power cable if stand alone)
600-1117-P1 Spare Heater Power Cable 120 VAC
600-1117-P2 Spare Heater Power Cable 230 VAC
914-410-P1 Spare Angle Valve, Manual
914-220-G1 Spare Angle Valve, Air Operated
961-206-G2 MPH Extension Kit
961-022-G1 Spare O-Ring and Nut Kit
074-5007-G1 Gas Analysis Product Manuals CD
MPH300M
Part Number Description
961-H3MAS MPH Sensor, 300 AMU EM/FC (MPH300M) w/ Y2O3/Ir Filaments
961-H3MBS MPH Sensor 300 AMU EM/FC (MPH300M) w/ Tungsten Filaments
MP-H30S MPH Electronics Box, 300 AMU FC or EM/FC (MPH300F, MPH300M) w/ Ethernet
961-700-G1 Coated Iridium Filament Kit
961-700-G2 Tungsten Filament Kit
961-701-G1 Coated Iridium Filament Ion Source
961-701-G2 Tungsten Filament Ion Source
961-2428-G2 Electron Multiplier Replacement Kit
961-416-P1 Spare MPH Heating Jacket
914-407-P1 Spare Valve Heating Jacket (required heater power cable if stand alone)
600-1117-P1 Spare Heater Power Cable 120 VAC
600-1117-P2 Spare Heater Power Cable 230 VAC
914-410-P1 Spare Angle Valve, Manual
914-220-G1 Spare Angle Valve, Air Operated
961-206-G2 MPH Extension Kit
961-205-G2 MPH HPR Extension Kit
961-022-G1 Spare O-Ring and Nut Kit
074-5007-G1 Gas Analysis Product Manuals CD
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