Transpector® CPM 3 Compact Process Monitor

 

FAST, FIELD-READY PROCESS MONITORING SYSTEM

 

Performance, Reliability, and Versatility

 

INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.


 

Transpector CPM 3 provides proven return on investment to our partners through:

  • Industry Leading Measurement Technology
  • Robust and Adaptive Architecture
  • Ease of Maintenance
  • Superior Product Support

Features

  • Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas—enables real-time process monitoring and analysis
  • ALD-Ready with 1.8 ms per point (555 points per second) measurement speed
  • Field-proven durability and reliability in the most demanding CVD and Etch applications
  • Application Integration—Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts
  • Compact size—allows for easy integration into production semiconductor equipment
  • Hexblock™ with up to three pressure inlets and reduced surface area to minimize surface reactions and response times
  • Capacitance Diaphragm Gauge (CDG)—CDG allows user to monitor the process pressure and automatically protect the system from pressure excursions
  • Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching

Specifications

Type 100 AMU CPM 200 AMU CPM 300 AMU CPM
Resolution 1 amu wide @ 10% peak height 1 amu wide @ 10% peak height 1 amu wide @ 10% peak height
Total Pressure Range¹ 5E-7 - 1E-3 Torr 5E-7 - 1E-3 Torr 5E-7 - 1E-3 Torr
Total Pressure Accuracy² +/- 25% 1E-6 - 1E-3 Torr +/- 25% 1E-6 - 1E-3 Torr +/- 25% 1E-6 - 1E-3 Torr
Maximum Ion Source Operating Pressure³ 1E-3 Torr 1E-3 Torr 1E-3 Torr
Nominal Operating Pressure⁴ 2E-4 Torr 2E-4 Torr 2E-4 Torr
System Operating Pressure 1E-8 Torr - 1.2 atm 1E-8 Torr - 1.2 atm 1E-8 Torr - 1.2 atm
Sensitivity (Low Emission) > 4E-6 Amps/Torr > 2E-6 Amps/Torr > 1E-6 Amps/Torr
Sensitivity (High Emission) > 2E-5 Amps/Torr > 1E-5 Amps/Torr > 5E-6 Amps/Torr
Minimum Detectable Partial Pressure⁵ 1E-13 Torr 2E-13 Torr 4E-13 Torr
Maximum Data Rate 1.8 ms/point (555 points/sec) 1.8 ms/point (555 points/sec) 1.8 ms/point (555 points/sec)
Abundance Sensitivity⁶ < 5 ppm < 10 ppm < 100 ppm
Zero Blast⁷ < 2 ppm < 25 ppm < 200 ppm
Detection Limit⁸ < 1 ppm < 2 ppm < 4 ppm
Linearity⁹ +/- 20% +/- 20% +/- 20%
Minimum Background Pressure 1E-8 Torr 1E-8 Torr 1E-8 Torr
Maximum Sensor and Inlet Temperature °C 150 150 150

1 Ion source pressure reading @ low emission using total pressure lens

2 Total pressure accuracy @ low emission

3 Maximum ion source operating pressure @ low emission

4 2x10-4 Torr in the ion source will produce about 1x10-5 Torr in the quadrupole region

5 MDPP at the ion source with EM on and 1s dwell time

6 Mass 40 contribution onto 41 AMU

7 Zero blast contribution onto 2 AMU

8 Minimum detectable concentration with Krypton in air @ a 1s dwell time

9 For 1 Torr orifices or lower. Linearity @ low emission at 0.1 to 2 times the nominal orifice pressure

Consumables

100 AMU CPM
Part Number Description
059-0196 NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400 Replacement c-ring
070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1 CPM Replacement Diaphragm Kit 2 Stage
923-706-G10 30 Torr HexBlock orifice (10.5 micron)
923-706-G3 10 Torr HexBlock orifice (20 micron)
923-706-G4 1 Torr HexBlock orifice (62 micron)
923-706-G6 10 mtorr HexBlock orifice (750 micron)
923-706-G7 360 mtorr HexBlock orifice (120 micron)
923-706-G8 15 mtorr HexBlock orifice (350 micron)
923-706-G9 3 Torr HexBlock orifice (35 micron)
923-707-G1 10 Torr HexBlock sniffer (5 cm length)
923-707-G2 100 Torr HexBlock sniffer (5 cm length)
923-707-G3 7 Torr HexBlock sniffer
964-710-G1 Filament Kit CPM Tungsten
964-710-G2 Filament Kit CPM Coated
964-711-G1 Ion Source Kit CPM Tungsten
964-711-G2 Ion Source Kit CPM Tungsten w/Liner
964-712-G1 Ion Source Kit CPM Coated
964-712-G2 Ion Source Kit CPM Coated w/Liner
961-707-G1 Electron Multiplier Kit, Spare
200 AMU CPM
Part Number Description
059-0196 NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400 Replacement c-ring
070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1 CPM Replacement Diaphragm Kit 2 Stage
923-706-G10 30 Torr HexBlock orifice (10.5 micron)
923-706-G3 10 Torr HexBlock orifice (20 micron)
923-706-G4 1 Torr HexBlock orifice (62 micron)
923-706-G6 10 mtorr HexBlock orifice (750 micron)
923-706-G7 360 mtorr HexBlock orifice (120 micron)
923-706-G8 15 mtorr HexBlock orifice (350 micron)
923-706-G9 3 Torr HexBlock orifice (35 micron)
923-707-G1 10 Torr HexBlock sniffer (5 cm length)
923-707-G2 100 Torr HexBlock sniffer (5 cm length)
923-707-G3 7 Torr HexBlock sniffer
961-707-G1 Electron Multiplier Kit, Spare
964-710-G1 Filament Kit CPM Tungsten
964-710-G2 Filament Kit CPM Coated
964-711-G1 Ion Source Kit CPM Tungsten
964-711-G2 Ion Source Kit CPM Tungsten w/Liner
964-712-G1 Ion Source Kit CPM Coated
964-712-G2 Ion Source Kit CPM Coated w/Liner
300 AMU CPM
Part Number Description
059-0196 NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400 Replacement c-ring
070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1 CPM Replacement Diaphragm Kit 2 Stage
923-706-G10 30 Torr HexBlock orifice (10.5 micron)
923-706-G3 10 Torr HexBlock orifice (20 micron)
923-706-G4 1 Torr HexBlock orifice (62 micron)
923-706-G6 10 mtorr HexBlock orifice (750 micron)
923-706-G7 360 mtorr HexBlock orifice (120 micron)
923-706-G8 15 mtorr HexBlock orifice (350 micron)
923-706-G9 3 Torr HexBlock orifice (35 micron)
923-707-G1 10 Torr HexBlock sniffer (5 cm length)
923-707-G2 100 Torr HexBlock sniffer (5 cm length)
923-707-G3 7 Torr HexBlock sniffer
961-707-G1 Electron Multiplier Kit, Spare
964-710-G1 Filament Kit CPM Tungsten
964-710-G2 Filament Kit CPM Coated
964-711-G1 Ion Source Kit CPM Tungsten
964-711-G2 Ion Source Kit CPM Tungsten w/Liner
964-712-G1 Ion Source Kit CPM Coated
964-712-G2 Ion Source Kit CPM Coated w/Liner

Spare Parts

100 AMU CPM
Part Number Description
032-0079 Turbo Molecular Pump (w/CF40 flange)
059-0400 Replacement c-ring
915-724-G1 Package of three spare liners (used only with liner configured ion source)
922-204-G1 Capillary assembly - 1.5 m
922-204-G3 Capillary assembly - 3 m
923-403-P2 CPM Valve Controller Manifold Assembly
923-417-G1 Foreline Protection Kit, CPM
923-710-G1 HexBlock orifice replacement tools
923-711-G1 HexBlock valve replacement kit
923-712-G1 Spare HexBlock orifice gasket (pack of five)
923-723-G2 2 Stage Diaphragm Foreline Pump
964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1 CPM Cable Box Assembly
964-403-P1 CPM Manifold Heater
964-603-G2 CPM Controller Box
964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
200 AMU CPM
Part Number Description
032-0079 Turbo Molecular Pump (w/CF40 flange)
059-0400 Replacement c-ring
915-724-G1 Package of three spare liners (used only with liner configured ion source)
922-204-G1 Capillary assembly - 1.5 m
922-204-G3 Capillary assembly - 3 m
923-403-P2 CPM Valve Controller Manifold Assembly
923-417-G1 Foreline Protection Kit, CPM
923-710-G1 HexBlock orifice replacement tools
923-711-G1 HexBlock valve replacement kit
923-712-G1 Spare HexBlock orifice gasket (pack of five)
923-723-G2 2 Stage Diaphragm Foreline Pump
964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1 CPM Cable Box Assembly
964-403-P1 CPM Manifold Heater
964-603-G2 CPM Controller Box
964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
300 AMU CPM
Part Number Description
032-0079 Turbo Molecular Pump (w/CF40 flange)
059-0400 Replacement c-ring
915-724-G1 Package of three spare liners (used only with liner configured ion source)
922-204-G1 Capillary assembly - 1.5 m
922-204-G3 Capillary assembly - 3 m
923-403-P2 CPM Valve Controller Manifold Assembly
923-417-G1 Foreline Protection Kit, CPM
923-710-G1 HexBlock orifice replacement tools
923-711-G1 HexBlock valve replacement kit
923-712-G1 Spare HexBlock orifice gasket (pack of five)
923-723-G2 2 Stage Diaphragm Foreline Pump
964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1 CPM Cable Box Assembly
964-403-P1 CPM Manifold Heater
964-603-G2 CPM Controller Box
964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
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