Rotary/Linear Motion Feedthroughs ISO-KF

INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.

The available flange designs ISO-KF / ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbarl/s. For UHV an all metal designed feedthrough is also available.

Benefits

  • Two FPM shaft seals
  • Direct push/pull and rotary actuation
  • With locking ring and optional anti-rotation device
  • 2011/65/EU RoHS compliant
  • Rotary/Linear Motion Feedthroughs ISO-KF

Specifications

Type FCH016-H FCH025-H FCH040-H
Vacuum connection DN 16 ISO-KF DN 25 ISO-KF DN 40 ISO-KF
Feedthrough/seal FPM FPM FPM
Shaft connection M 3 / Ø5mm M 4 / Ø8mm M 6 / Ø12mm
Travel mm 50 100 150
Shaft load      
Radial force at max.travel N 10 15 30
Torsion torque N•m 2 8 20
Tightness, static mbar•L/s 1 x 10-9 1 x 10-9 1 x 10-9
Pressure (absolute) 1 x 10-8 mbar ... 1bar 1 x 10-8 mbar ... 1bar 1 x 10-8 mbar ... 1bar
Operating temperature °C 50 50 50
Bakeout temperature °C 110 110 110
Materials exposed to process media stainless steel 304/1.4301, aluminum 6082 stainless steel 304/1.4301, aluminum 6082 stainless steel 304/1.4301, aluminum 6082
Weight kg 0.1 0.2 0.3

Part Number

FCH016-H
Part Number Description
214-320 FCH016-H Rotary/linear motion feedthroug
214-072 Anti-rotation device DN 16
FCH025-H
Part Number Description
214-322 FCH025-H Rotary/linear motion feedthroug
214-073 Anti-rotation device DN 25
FCH040-H
Part Number Description
214-324 FCH040-H Rotary/linear motion feedthroug
214-074 Anti-rotation device DN 40
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