Rotary Feedthroughs CF

INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.

The available flange designs ISO-KF / ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbarl/s. For UHV an all metal designed feedthrough is also available.

Benefits

  • Bellow sealed
  • All-metal version
  • For very demanding vacuum requirements
  • 2011/65/EU RoHS compliant
  • FRU DN 16 - DN 40.gif

Specifications

Type FRU016-H FRU040-N FRU040-L
Vacuum connection DN 16 CF-F DN 40 CF-F DN 40 CF-F
Feedthrough/seal bellow bellow bellow
Shaft connection mm 4 8 12
Transferable torque      
Dynamic N•m 0.4 4 10
Dynamic, at 300 °C N•m 0.2 2 2
Static N•m 0.2 3 5
Rotational speed RPM 200 1000 500
At max. torque RPM ­ 500 300
Shaft load vacuum sided      
Radial force N 10 60 100
Axial force N 5 20 30
Service life Revolutions 1 000 000 2 000 000 1 000 000
Scale division degree 10
Tightness mbar•L/s 5 x 10-11 5 x 10-11 5 x 10-11
Pressure (absolute) 1 x 10-10 mbar ... 2 bar 1 x 10-10 mbar ... 2 bar 1 x 10-10 mbar ... 2 bar
Operating temperature °C 300 300 300
Bakeout temperature °C 300 300 300
Materials exposed to process media 304L/1.4306, 304/1.4301, –/2.4360 304L/1.4306, 304/1.4301, –/2.4360 304L/1.4306, 304/1.4301, 303/1.4305
Weight kg 0.3 1.5 3

Part Number

FRU016-H
Part Number Description
214-310 FRU016-H Rotary feedthrough DN 16 CF-F
FRU040-N
Part Number Description
214-312 FRU040-N Rotary feedthrough DN 40 CF-F
FRU040-L
Part Number Description
214-314 FRU040-L Rotary feedthrough DN 40 CF-F
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