PSG5xx ATM to Medium Vacuum Gauge

 

The INFICON Pirani Standard Gauges, PSG500, PSG502-S, PSG510-S and PSG512-S, employ the most advanced digital Pirani technology available in themarketplace. The rugged stainless steel sensor cell and compact design qualifythem for use on semiconductor systems and for standard applications, such as fore vacuum lines.

Benefits

  • Easy push button ATM and HV adjustment
  • Space saving rugged design
  • Aluminum housing
  • Mounts in any orientation
  • Stainless steel measuring cell with metal-sealed feedthrough
  • Logarithmic signal output for easy integration
  • 10 bar absolute overpressure with threaded connections
  • 250 °C bakeable version
  • Nickel filament option for corrosive applications
  • Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
  • Optional setpoints
  • RoHS compliance

Typical Applications

  • Controlling high vacuum ionization gauges
  • Fore vacuum pressure monitoring
  • Safety circuits in vacuum systems
  • General vacuum measurement and control in the fine and rough vacuum range
  • tiba29e1 Massbild.gif

Specifications

Type PSG500 tungsten PSG500-S tungsten, setpoints PSG502-S nickel, setpoints PSG510-S tungsten, setpoints, ceramic feedthroughs PSG512-S nickel, setpoints, ceramic feedthroughs
Measuring principle thermal conductance according to Pirani thermal conductance according to Pirani thermal conductance according to Pirani thermal conductance according to Pirani thermal conductance according to Pirani
Accuracy(N2)          
1 x 10-3 … 100 mbar % of reading ±15% ±15% ±15% ±15% ±15%
5 x 10-4 … 1 x 10-3 mbar % of reading ±50% ±50% ±50% ±50% ±50%
100 … 1000 mbar % of reading ±50% ±50% ±50% ±50% ±50%
Repeatability (air)          
1 x 10-3 … 100 mbar % of reading 2% 2% 2% 2% 2%
Output signal (measurement signal)          
Voltage range V 0 … +10.3 0 … +10.3 0 … +10.3 0 … +10.3 0 … +10.3
Measurement range V +1.9 … +10.0 +1.9 … +10.0 +1.9 … +10.0 +1.9 … +10.0 +1.9 … +10.0
Measurement range (air, 02, CO, N2) mbar 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000
Setpoint          
Number of setpoints none 2 2 2 2
Setting range mbar 2 x 10-3 … 500 2 x 10-3 … 500 2 x 10-3 … 500 2 x 10-3 … 500
Hysteresis % of reading 10% above lower threshold 10% above lower threshold 10% above lower threshold 10% above lower threshold
Relay contact 30 30 30 30
Relay contact: Switching time ms <20 <20 <20 <20
Supply voltage          
At gauge V (dc) +14 …+30 +14 …+30 +14 …+30 +14 …+30 +14 …+30
Ripple V (p-p) ≤1 ≤1 ≤1 ≤1 ≤1
Voltage vs. pressure logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade
Internal volume          
DN 16 ISO-KF, DN 16 CF-R, 7/16-20 UNF cm³ (in.³) 1.5 (0.092) 1.5 (0.092) 1.5 (0.092) 1.5 (0.092) 1.5 (0.092)
DN 16 ISO-KF & DN 16 CF-R long tube cm³ (in.³) 10 (0.61) 10 (0.61) 10 (0.61) 10 (0.61) 10 (0.61)
1/8'' NPT , 4 VCR, 8 VCR, 1/2'' tube cm³ (in.³) 2 (0.122) 2 (0.122) 2 (0.122) 2 (0.122) 2 (0.122)
Admissible temperature          
Operation °C +5 … +60 +5 … +60 +5 … +60 +5 … +60 +5 … +60
Vacuum connection (1) °C 80 / 250 (2) 80 / 250 (2) 80 / 250 (2) 80 / 250 (2) 80 / 250 (2)
Storage °C -20 … +65 -20 … +65 -20 … +65 -20 … +65 -20 … +65
Weight          
DN 16 ISO-KF, 7/16-20 UNF g 80 80 80 80 80
DN 16 CF-R, 4 VCR g 100 100 100 100 100
1/8'' NPT, 1/2'' tube g 70 70 70 70 70
8 VCR, DN 16 ISO-KF long tube g 130 130 130 130 130
DN 16 CF-R long tube g 140 140 140 140 140
Error signal V 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture)
Output impedance 2 x 4.7 2 x 4.7 2 x 4.7 2 x 4.7 2 x 4.7
Minimum loaded impedance kΩ 10, short-circuit proof 10, short-circuit proof 10, short-circuit proof 10, short-circuit proof 10, short-circuit proof
Response time ms 80 80 80 80 80
Gauge identification kΩ 27.0, referenced to supply common 27.0, referenced to supply common 27.0, referenced to supply common 27.0, referenced to supply common 27.0, referenced to supply common
Adjustment one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment
Current consumption mA <500 (max. starting current) <500 (max. starting current) <500 (max. starting current) <500 (max. starting current) <500 (max. starting current)
Power consumption W ≤1 ≤1 ≤1 ≤1 ≤1
Electrical connection FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male
Sensor cable 8 poles plus shielding 8 poles plus shielding 8 poles plus shielding 8 poles plus shielding 8 poles plus shielding
Cable length m ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2)
Materials exposed to vacuum glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435
Filament W W Ni W Ni
Admissible pressure bar (absolute) 10, limited to inert gases 10, limited to inert gases 10, limited to inert gases 10, limited to inert gases 10, limited to inert gases
Mounting orientation any any any any any
Degree of protection IP40 IP40 IP40 IP40 IP40

(1) In horizontal mounting orientation

(2) Long tube

Part Number

PSG500 tungsten
Part Number Description
350-060 PSG500 DN 16 ISO-KF.
350-061 PSG500 1/8" NPT
350-062 PSG500 DN 16 CF-R
350-063 PSG500 1/2" Tube
350-064 PSG500 8-VCR (1/2")
350-065 PSG500 4-VCR (1/4")
350-066 PSG500 7/16-20 UNF
350-067 PSG500 DN 16 ISO-KF, ext. body
350-068 PSG500 DN 16 CF-R, ext. body
PSG500-S tungsten, setpoints
Part Number Description
350-080 PSG500-S DN 16 ISO-KF
350-081 PSG500-S 1/8" NPT
350-082 PSG500-S DN 16 CF-R
350-083 PSG500-S 1/2" Tube
350-084 PSG500-S 8-VCR (1/2")
350-085 PSG500-S 4-VCR (1/4")
350-086 PSG500-S 7/16-20 UNF
350-087 PSG500-S DN 16 ISO-KF, ext. body
350-088 PSG500-S DN 16 CF-R, ext. body
PSG502-S nickel, setpoints
Part Number Description
350-140 PSG502-S DN 16 ISO-KF
350-141 PSG502-S 1/8" NPT
350-142 PSG502-S DN 16 CF-R
350-143 PSG502-S 1/2" Tube
350-144 PSG502-S 8-VCR (1/2")
350-145 PSG502-S 4-VCR (1/4")
350-146 PSG502-S 7/16-20 UNF
350-147 PSG502-S DN 16 ISO-KF, ext. body
350-148 PSG502-S DN 16 CF-R, ext. body
PSG510-S tungsten, setpoints, ceramic feedthroughs
Part Number Description
350-200 PSG510-S DN 16 ISO-KF
PSG512-S nickel, setpoints, ceramic feedthroughs
Part Number Description
350-300 PSG512-S DN 16 ISO-KF

Accessories

PSG500 tungsten
Part Number Description
211-001 Clamping ring DN 10-16 ISO-KF
PSG500-S tungsten, setpoints
Part Number Description
211-001 Clamping ring DN 10-16 ISO-KF
PSG502-S nickel, setpoints
Part Number Description
211-001 Clamping ring DN 10-16 ISO-KF
PSG510-S tungsten, setpoints, ceramic feedthroughs
Part Number Description
211-001 Clamping ring DN 10-16 ISO-KF
PSG512-S nickel, setpoints, ceramic feedthroughs
Part Number Description
211-001 Clamping ring DN 10-16 ISO-KF

Spare Parts

PSG500 tungsten
Part Number Description
350-920 PSG500 Spare Sensor DN 16 KF
350-921 PSG500 Spare Sensor 1/8" NPT
350-922 PSG500 Spare Sensor DN 16 CF-R
350-923 PSG500 Spare Sensor 1/2" Tube
350-924 PSG500 Spare Sensor 8-VCR (1/2")
350-925 PSG500 Spare Sensor 7/16-20 UNF
350-926 PSG500 Spare Sensor 4-VCR (1/4")
350-927 PSG500 Spare Sensor DN 16 KF,ext.body
350-928 PSG500 Spare Sensor DN 16 CF-R,ext.body
PSG500-S tungsten, setpoints
Part Number Description
350-920 PSG500 Spare Sensor DN 16 KF
350-921 PSG500 Spare Sensor 1/8" NPT
350-922 PSG500 Spare Sensor DN 16 CF-R
350-923 PSG500 Spare Sensor 1/2" Tube
350-924 PSG500 Spare Sensor 8-VCR (1/2")
350-925 PSG500 Spare Sensor 7/16-20 UNF
350-926 PSG500 Spare Sensor 4-VCR (1/4")
350-927 PSG500 Spare Sensor DN 16 KF,ext.body
350-928 PSG500 Spare Sensor DN 16 CF-R,ext.body
PSG502-S nickel, setpoints
Part Number Description
350-900 PSG502 Spare Sensor DN 16 KF
350-901 PSG502 Spare Sensor 1/8" NPT
350-902 PSG502 Spare Sensor DN 16 CF-R
350-903 PSG502 Spare Sensor 1/2" Tube
350-904 PSG502 Spare Sensor 8-VCR (1/2")
350-905 PSG502 Spare Sensor 7/16-20 UNF
350-906 PSG502 Spare Sensor 4-VCR (1/4")
350-907 PSG502 Spare Sensor DN 16 KF,ext.body
350-908 PSG502 Spare Sensor DN 16 CF-R,ext.body
PSG510-S tungsten, setpoints, ceramic feedthroughs
Part Number Description
350-930 PSG510 Spare Sensor DN 16 KF
PSG512-S nickel, setpoints, ceramic feedthroughs
Part Number Description
350-940 PSG512 Spare Sensor DN 16 KF
send to a friend