PCG55x ATM to Medium Vacuum Gauge

 

The INFICON Pirani Capacitance Diaphragm Gauge (PCG55x) combines the INFICON Pirani technology with the advantages of a ceramic capacitance diaphragm sensor in a single product.

In the measurement range between 10 mbar and atmosphere the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement. The PCG55x offers also a variety of features which allows the right product configuration for the demanded application.

Benefits

  • Gas type independent above 10 mbar – allows safe venting with any gas mixture
  • High accuracy and reproducibility at atmosphere – for reliable, fast atmospheric pressure detection
  • Versatile of mounting orientation – provides engineering freedom in tool design
  • Available with Tungsten (PCG550) or Nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications
  • Easy to exchange plug & play sensor element with on-board calibration data – guarantees high reproducibility and low cost of ownership
  • Selectable output signal for easy integration
  • Optional atmospheric switch, display and digital interfaces
  • Compliance & standards: CE, EN, UL, CSA, RoHS

Typical Applications

  • Load Lock control
  • Fore vacuum pressure measurement
  • Safety circuits in vacuum systems
  • General vacuum measurement and control in the medium and rough vacuum range

News

NEW! With EtherCAT digital interface available now !

  • tiba42e1 Massbild mit EtherCAT und Stecker.png

Specifications

Type PCG550 Tungsten PCG552 Nickel PCG554 ceramic coated
Measurement range 5×10-5 … 1500 5×10-5 … 1500 5×10-5 … 1500
Accuracy      
5×10-4 … 1×10-3 mbar (N2) % of reading ±50 ±50 ±50
1×10-3 … 100 mbar (N2) % of reading ±15 ±15 ±15
100 … 950 mbar % of reading ±5 ±5 ±5
950 … 1050 mbar % of reading ±2.5 ±2.5 ±2.5
Repeatability      
1×10-3 … 1100 mbar (N2) % of reading ±2 ±2 ±2
Admissible pressure bar (absolute) ≤5 ≤5 ≤5
Pressure, max. bar (absolute) ≥10 ≥10 ≥10
Admissible temperature      
Operation (ambient) °C +10 … +50 +10 … +50 +10 … +50
Storage °C -20 … +65 -20 … +65 -20 … +65
Bakeout at flange °C ≤80 ≤80 ≤80
Bakeout at flange long tube °C ≤250 ≤250 ≤250
Supply voltage V (dc) +15 … +30 +15 … +30 +15 … +30
Power consumption      
Without fieldbus W ≤2.5 ≤2.5 ≤2.5
DeviceNet™ W ≤3 ≤3 ≤3
Profibus W ≤3 ≤3 ≤3
Output signal analog 3PCx-0xx-xxx0 V 0 … +10.23 0 … +10.23 0 … +10.23
Output signal analog 3PCx-0xx-xxx1 V 0 … +8.68 0 … +8.68 0 … +8.68
Output signal analog 3PCx-0xx-xxx2 V 0 … +5.659 0 … +5.659 0 … +5.659
Output signal analog 3PCx-0xx-xxx3 V 0 … +9.05 0 … +9.05 0 … +9.05
Measuring range 3PCx-0xx-xxx0 V +0.61 … +10.23 +0.61 … +10.23 +0.61 … +10.23
Measuring range 3PCx-0xx-xxx1 V +1.2 … +8.68 +1.2 … +8.68 +1.2 … +8.68
Measuring range 3PCx-0xx-xxx2 V +0.375 … +5.659 +0.375 … +5.659 +0.375 … +5.659
Measuring range 3PCx-0xx-xxx3 V +1.57 … +9.05 +1.57 … +9.05 +1.57 … +9.05
Voltage vs. pressure      
3PCx-0xx-xxx0 volts per decade 1.286 1.286 1.286
3PCx-0xx-xxx1 / -xxx2 / -xxx3 volts per decade 1 1 1
Load impedance kΩ >10 >10 >10
Setpoint relay      
Number of setpoints 2 2 2
Range (N2) mbar 5×10-5 … 1000 5×10-5 … 1000 5×10-5 … 1000
Relay contact n.o., potential free n.o., potential free n.o., potential free
Hysteresis % of threshold 10 10 10
Contact rating solid state relays ≤30 ≤30 ≤30
Contact rating mechanical relays ≤30 ≤30 ≤30
Switching time ms ≤30 ≤30 ≤30
Interface (digital) RS232C RS232C RS232C
Electrical connection      
3PCx-0xx-x0xx FCC, 8-pin FCC, 8-pin FCC, 8-pin
3PCx-0xx-x1xx D-Sub, 9-pin, male D-Sub, 9-pin, male D-Sub, 9-pin, male
3PCx-0xx-x2xx D-Sub, 15-pin HD, male D-Sub, 15-pin HD, male D-Sub, 15-pin HD, male
3PCx-0xx-x4xx D-Sub, 15-pin HD, with RS485, male D-Sub, 15-pin HD, with RS485, male D-Sub, 15-pin HD, with RS485, male
Cable length m (ft.) ≤100 (≤330) ≤100 (≤330) ≤100 (≤330)
RS232C operation m (ft.) ≤30 (≤100) ≤30 (≤100) ≤30 (≤100)
Materials exposed to vacuum W, Ni, NiFe, Al2O3, SnAg, stainless steel, glass Ni, NiFe, Al2O3, SnAg, stainless steel, glass Al2O3, stainless steel
Internal volume      
DN 16 ISO-KF cm³ 4.7 4.7 4.7
DN 16 ISO-KF long tube cm³ 14.5 14.5 14.5
DN 16 CF-F cm³ 8 8 8
DN 16 CF-R long tube cm³ 14 14 14
DN 25 ISO-KF, 4 VCR cm³ 5.5 5.5 5.5
8 VCR cm³ 7 7 7
1/8'' NPT, 7/16-20 UNF cm³ 5.2 5.2 5.2
Surface mount 29 mm/1.15 inch cm³ 4.9 4.9 4.9
4 VCR 90° cm³ 7.9 7.9 7.9
Weight      
Without fieldbus interface g 115 … 130 115 … 130 115 … 130
With fieldbus interface g 230 … 250 230 … 250 230 … 250
Degree of protection IP 40 IP 40 IP 40
Standards      
CE conformity EN 61000-6-2/-6-3, EN 61010 EN 61000-6-2/-6-3, EN 61010 EN 61000-6-2/-6-3, EN 61010
ETL certification UL 61010-1, CSA 22.2 No.61010-1 UL 61010-1, CSA 22.2 No.61010-1 UL 61010-1, CSA 22.2 No.61010-1
DeviceNet™      
Protocol DeviceNet™, group 2 slave only DeviceNet™, group 2 slave only DeviceNet™, group 2 slave only
Data rate switch kBaud 125, 250, 500 or network programmable 125, 250, 500 or network programmable 125, 250, 500 or network programmable
Cable length 125 kbps m (ft.) 500 (1650) 500 (1650) 500 (1650)
Cable length 250 kbps m (ft.) 250 (825) 250 (825) 250 (825)
Cable length 500 kbps m (ft.) 100 (330) 100 (330) 100 (330)
MAC ID 2 switches (address 00 - 63) or network programmable 2 switches (address 00 - 63) or network programmable 2 switches (address 00 - 63) or network programmable
Digital functions read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error
Specification DeviceNet™ "Vacuum Gauge Device Profile" DeviceNet™ "Vacuum Gauge Device Profile" DeviceNet™ "Vacuum Gauge Device Profile"
Device type ''CG'' for combination gauge ''CG'' for combination gauge ''CG'' for combination gauge
I / O slave messaging polling only polling only polling only
Supply voltage for DeviceNet™ 3PI6- / 3PI7- / 3PI8-0xx-xxxx V (dc) +15 … +30 +15 … +30 +15 … +30
Power consuption 3PI6- / 3PI7- / 3PI8-0xx-xxxx W ≤3 ≤3 ≤3
Connector for DeviceNet Micro-Style, 5-pin, male Micro-Style, 5-pin, male Micro-Style, 5-pin, male
Profibus DP      
Baud rates 9.6 / 19.2 / 93.75 / 187.5 / 500 9.6 / 19.2 / 93.75 / 187.5 / 500 9.6 / 19.2 / 93.75 / 187.5 / 500
Address 2 switches (address 00 - 127) or network programmable 2 switches (address 00 - 127) or network programmable 2 switches (address 00 - 127) or network programmable
Digital functions read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error
Connector for Profibus DP D-Sub, 9-pin, female D-Sub, 9-pin, female D-Sub, 9-pin, female
RS485C      
Baud rates kBaud 9.6 / 19.2 / 38.4 /57.6 9.6 / 19.2 / 38.4 /57.6 9.6 / 19.2 / 38.4 /57.6
Address 2 switches (address 00 - 255) 2 switches (address 00 - 255) 2 switches (address 00 - 255)
Digital functions read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error read pressure, select units: Torr, mbar, Pa, micron, counts; monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error
Connector for RS485 D-Sub, 15-pin HD, male D-Sub, 15-pin HD, male D-Sub, 15-pin HD, male
EtherCAT      
Protocol EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT
Communication standards ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"
Node address Explicit Device Identification Explicit Device Identification Explicit Device Identification
Physical layer 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3)
EtherCAT connector RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT
Cable shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher
Cable length m (ft.) ≤100 (330) ≤100 (330) ≤100 (330)
Process data Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping
Mailbox (CoE) SDO requests, responses and information SDO requests, responses and information SDO requests, responses and information

Part Number

PCG55X.PNG

Accessories

PCG550 Tungsten
Part Number Description
211-001 Clamping ring DN 10-16 ISO-KF
211-097 Centering ring with fine filter DN 16 KF
303-333 Diagnostic cable 1.9m (P3)
PCG552 Nickel
Part Number Description
211-001 Clamping ring DN 10-16 ISO-KF
211-097 Centering ring with fine filter DN 16 KF
303-333 Diagnostic cable 1.9m (P3)
PCG554 ceramic coated
Part Number Description
211-001 Clamping ring DN 10-16 ISO-KF
211-097 Centering ring with fine filter DN 16 KF
303-333 Diagnostic cable 1.9m (P3)

Spare Parts

PCG550 Tungsten
Part Number Description
357-925 PCG550 Spare Sensor, DN16ISO-KF
357-926 PCG550 Spare Sensor, DN16ISO-KF, long
357-927 PCG550 Spare Sensor, DN16CF-F
357-928 PCG550 Spare Sensor, DN16CF-R, long
357-929 PCG550 Spare Sensor, DN25ISO-KF
357-930 PCG550 Spare Sensor, 1/8" NPT
357-931 PCG550 Spare Sensor, 8-VCR
357-932 PCG550 Spare Sensor, 4-VCR
357-933 PCG550 Spare Sensor, 7/16-20 UNF
357-934 PCG550 Spare Sensor, 29x29mm
357-935 PCG550 Spare Sensor, 4-VCR / 90°
PCG552 Nickel
Part Number Description
357-936 PCG552 Spare Sensor, DN16ISO-KF
357-937 PCG552 Spare Sensor, DN16ISO-KF, long
357-938 PCG552 Spare Sensor, DN16CF-F
357-939 PCG552 Spare Sensor, DN16CF-R, long
357-941 PCG552 Spare Sensor, 1/8" NPT
357-942 PCG552 Spare Sensor, 8-VCR
357-943 PCG552 Spare Sensor, 4-VCR
357-944 PCG552 Spare Sensor, 7/16-20 UNF
357-945 PCG552 Spare Sensor, 29x29mm
357-946 PCG552 Spare Sensor, 4-VCR / 90°
PCG554 ceramic coated
Part Number Description
357-947 PCG554 Spare Sensor, DN16ISO-KF
357-948 PCG554 Spare Sensor, DN16ISO-KF, long
357-949 PCG554 Spare Sensor, DN16CF-F
357-950 PCG554 Spare Sensor, DN16CF-R, long
357-951 PCG554 Spare Sensor, DN25ISO-KF
357-952 PCG554 Spare Sensor, 1/8" NPT
357-953 PCG554 Spare Sensor, 8-VCR
357-954 PCG554 Spare Sensor, 4-VCR
357-955 PCG554 Spare Sensor, 7/16-20 UNF
357-956 PCG554 Spare Sensor, 29x29mm
357-957 PCG554 Spare Sensor, 4-VCR / 90°

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