Linear Motion Feedthroughs CF

INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.

The available flange designs ISO-KF / ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbarl/s. For UHV an all metal designed feedthrough is also available.

Benefits

  • With bellows for more demanding vacuum requirements
  • Direct push and pull actuation
  • High accuracy adjustment using micrometer screw
  • 2011/65/EU RoHS compliant
  • Linear Motion Feedthroughs CF

Specifications

Type FPU016-H FPU040-H FPU016-Z FPU040-Z
Vacuum connection DN 16 CF-R DN 40 CF-R DN 16 CF-R DN 40 CF-R
Feedthrough/seal bellow bellow bellow bellow
Shaft connection M4x16mm M6x10mm, Ø10mm M4x16mm M6x10mm, Ø10mm
Actuator manual manual micrometer screw micrometer screw
Travel mm 25 50 20 50
Travel per revolution mm ­ ­ 0.5 1
Scale division mm 5 10 0.01 0.005
Shaft load        
Radial force at max. N 20 100 20 100
Axial force vacuum N 85 140 185 440
Axial force against atm N 100 200 200 500
Torsion torque N•m 0.2 0.5 0.2 0.5
Tightness mbar•L/s 5 x 10-11 5 x 10-11 5 x 10-11 5 x 10-11
Pressure (absolute) 1 x 10-10 mbar ... 2 bar 1 x 10-10 mbar ... 2 bar 1 x 10-10 mbar ... 2 bar 1 x 10-10 mbar ... 2 bar
Bakeout temperature        
Feedtrough °C 300 300 300 300
Micrometer screw °C ­ ­ 100 100
Materials exposed to process media stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 stainless steel 304L/1.4306, stainless steel 316Ti/1.4571
Weight kg 0.15 0.75 0.25 1

Part Number

FPU016-H
Part Number Description
214-330 FPU016-H Linear feedthrough DN 16 CF-R
FPU040-H
Part Number Description
214-332 FPU040-H Linear feedthrough DN 40 CF-R
FPU016-Z
Part Number Description
214-334 FPU016-Z Linear feedthrough DN 16 CF-R
FPU040-Z
Part Number Description
214-336 FPU040-Z Linear feedthrough DN 40 CF-R
send to a friend