SKY® CDG025D 0.1 ... 1000 Torr / mbar

 

The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation. The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.

The INFICON  SKY  CDG025D Capacitance Diaphragm Gauges are direct replacements for the Oerlikon Leybold  CTR 100 transmitters.  Get the original from the manufacterer with global support and solutions for all applications.

CTR 100, 230 300, 230 301, 230 340Vv01, 230 302, 230 303, 230 304V01, 230 305, 230 306, 230 307, 230 308, 230 309 V01, 230 311, 230 312, 230 313, 230 314 V01, 230 315, 230 316, 230 317, 230 318, 230 319 V01

 Flange typeFull scale INFICON part number old Oerlikon Leybold  part number
  [Torr] CDG025D CTR 100
 DN 16 ISO-KF1000 375-001 230 300
 100 376-001 230 301
 20 383-001 230 340V01
 10 377-001 230 302
 1 378-001 230 303
  0.1 379-001 230 304V01
     
 DN16 CF-R1000 375-002 230 305
 100 376-002 230 306
 10 377-002 230 307
 1 378-002 230 308
  0.1 379-002 230 309 V01
     
 Cajon 8 VCR1000 375-003 230 310
 100 376-003 230 311
 10 377-003 230 312
 1 378-003 230 313
  0.1 379-003 230 314 V01
     
 1/2" tube1000 375-000 230 315
 100 376-000 230 316
 10 377-000 230 317
 1 378-000 230 318
  0.1 379-000 230 319 V01

Benefits

  • Fully compatible with CTR 100 transmitters
  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • One pushbutton zero function
  • Wide range power supply

Typical Applications

  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement

News

CDG025D series is 100% drop in replacement for CTR 100 vacuum transmitters.
  • CDG025D dimensions

Specifications

Type 1000 Torr / 1100 mbar 500 ... 10 Torr / mbar 1 Torr / mbar 0.25 Torr 0.1 Torr / mbar
Accuracy (1) % of reading 0.2 0.2 0.2 0.25 0.5
Temperature effect          
on zero percent FS/°C 0.005 0.005 0.015 0.02 0.02
on span % of reading / °C 0.01 0.01 0.01 0.03 0.03
Resolution percent FS 0.003 0.003 0.003 0.003 0.003
Pressure, max. kPa (absolute) 400 260 260 130 130
Response time (2) ms 30 30 30 130 130
Lowest reading percent FS 0.01 0.01 0.01 0.01 0.01
Lowest suggested reading percent FS 0.05 0.05 0.05 0.05 0.05
Lowest suggested control pressure percent FS 0.5 0.5 0.5 0.5 0.5
Temperature          
Operation (ambient) °C +5 … +50 +5 … +50 +5 … +50 +5 … +50 +5 … +50
Bakeout at flange (3) °C ≤110 ≤110 ≤110 ≤110 ≤110
Storage °C –40 … +65 –40 … +65 –40 … +65 –40 … +65 –40 … +65
Supply voltage V (dc) +14 … +30 +14 … +30 +14 … +30 +14 … +30 +14 … +30
Power consumption W ≤1 ≤1 ≤1 ≤1 ≤1
Output signal (analog) V (dc) 0 … +10 0 … +10 0 … +10 0 … +10 0 … +10
Degree of protection IP 30 IP 30 IP 30 IP 30 IP 30
Standards          
CE conformity EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS
ETL certification UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
Electrical connection D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass
Internal volume          
1/2'' tube cm³ (in.³) 3.6 (0.22)        
DN 16 ISO KF cm³ (in.³) 3.6 (0.22)        
DN 16 CF-R cm³ (in.³) 3.6 (0.22)        
8 VCR® cm³ (in.³) 3.6 (0.22)        
Weight          
1/2'' tube g        
DN 16 ISO KF g        
DN 16 CF-R g        
8 VCR® g        

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.

(2) Increase 10 … 90 percent FS

(3) Non operation

(4) CDG025D-S only

(5) 28% Ni, 23% Co, 49% Fe

(6) 18% Cr, 10% Ni, 3% Mo, 69% Fe

Part Number

1000 Torr / 1100 mbar
Part Number Description
375-000 CDG025D 1`000 Torr; 1/2¨tube
375-001 CDG025D 1`000 Torr; DN16ISO-KF
375-002 CDG025D 1`000 Torr; DN16CF-R
375-003 CDG025D 1000 Torr; 8-VCR
376-000 CDG025D 100 Torr; 1/2¨tube
376-001 CDG025D 100 Torr; DN16ISO-KF
376-002 CDG025D 100 Torr; DN16CF-R
376-003 CDG025D 100 Torr; 8-VCR
377-000 CDG025D 10 Torr; 1/2¨tube
377-001 CDG025D 10 Torr; DN16ISO-KF
377-002 CDG025D 10 Torr; DN16CF-R
377-003 CDG025D 10 Torr; 8-VCR
378-000 CDG025D 1 Torr; 1/2¨tube
378-001 CDG025D 1 Torr; DN16ISO-KF
378-002 CDG025D 1 Torr; DN16CF-R
378-003 CDG025D 1 Torr; 8-VCR
379-000 CDG025D 0.1 Torr; 1/2¨tube
379-001 CDG025D 0.1 Torr; DN16ISO-KF
379-002 CDG025D 0.1 Torr; DN16CF-R
379-003 CDG025D 0.1 Torr; 8-VCR
383-001 CDG025D 20 Torr; DN16ISO-KF
send to a friend